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- W3204659946 abstract "The goal of this work is to prepare process readiness towards High NA EUV lithography, by using 0.33NA exposures on NXE3400B scanner. We focus on photoresists, underlayers and etch processes mitigation of P24nm Line Space patterns. Etch transfer has been validated for Metal Oxide Resist (MOR). Furthermore, we investigate challenges to accelerate Chemically Amplified Resist (CAR) P24nm Line Space processes. Also, here, promising patterning results have been achieved. Thin film metrology-friendly methods like Atomic Force Microscopy (AFM) have been performed to characterize and improve the CAR-based etch processes." @default.
- W3204659946 created "2021-10-11" @default.
- W3204659946 creator A5000328835 @default.
- W3204659946 creator A5005195191 @default.
- W3204659946 creator A5036126553 @default.
- W3204659946 creator A5052932976 @default.
- W3204659946 creator A5059513127 @default.
- W3204659946 creator A5064329828 @default.
- W3204659946 creator A5068204367 @default.
- W3204659946 creator A5069335423 @default.
- W3204659946 creator A5070237644 @default.
- W3204659946 creator A5080006756 @default.
- W3204659946 date "2021-09-28" @default.
- W3204659946 modified "2023-10-03" @default.
- W3204659946 title "Towards high NA patterning readiness: materials, processes and etch transfer investigation for P24 Line Space" @default.
- W3204659946 doi "https://doi.org/10.1117/12.2601839" @default.
- W3204659946 hasPublicationYear "2021" @default.
- W3204659946 type Work @default.
- W3204659946 sameAs 3204659946 @default.
- W3204659946 citedByCount "1" @default.
- W3204659946 countsByYear W32046599462022 @default.
- W3204659946 crossrefType "proceedings-article" @default.
- W3204659946 hasAuthorship W3204659946A5000328835 @default.
- W3204659946 hasAuthorship W3204659946A5005195191 @default.
- W3204659946 hasAuthorship W3204659946A5036126553 @default.
- W3204659946 hasAuthorship W3204659946A5052932976 @default.
- W3204659946 hasAuthorship W3204659946A5059513127 @default.
- W3204659946 hasAuthorship W3204659946A5064329828 @default.
- W3204659946 hasAuthorship W3204659946A5068204367 @default.
- W3204659946 hasAuthorship W3204659946A5069335423 @default.
- W3204659946 hasAuthorship W3204659946A5070237644 @default.
- W3204659946 hasAuthorship W3204659946A5080006756 @default.
- W3204659946 hasConcept C100460472 @default.
- W3204659946 hasConcept C102951782 @default.
- W3204659946 hasConcept C105487726 @default.
- W3204659946 hasConcept C120665830 @default.
- W3204659946 hasConcept C121332964 @default.
- W3204659946 hasConcept C134406635 @default.
- W3204659946 hasConcept C136525101 @default.
- W3204659946 hasConcept C142724271 @default.
- W3204659946 hasConcept C162117346 @default.
- W3204659946 hasConcept C162996421 @default.
- W3204659946 hasConcept C171250308 @default.
- W3204659946 hasConcept C177409738 @default.
- W3204659946 hasConcept C192209626 @default.
- W3204659946 hasConcept C192562407 @default.
- W3204659946 hasConcept C195766429 @default.
- W3204659946 hasConcept C204223013 @default.
- W3204659946 hasConcept C204787440 @default.
- W3204659946 hasConcept C2779227376 @default.
- W3204659946 hasConcept C2779751349 @default.
- W3204659946 hasConcept C49040817 @default.
- W3204659946 hasConcept C53524968 @default.
- W3204659946 hasConcept C71924100 @default.
- W3204659946 hasConceptScore W3204659946C100460472 @default.
- W3204659946 hasConceptScore W3204659946C102951782 @default.
- W3204659946 hasConceptScore W3204659946C105487726 @default.
- W3204659946 hasConceptScore W3204659946C120665830 @default.
- W3204659946 hasConceptScore W3204659946C121332964 @default.
- W3204659946 hasConceptScore W3204659946C134406635 @default.
- W3204659946 hasConceptScore W3204659946C136525101 @default.
- W3204659946 hasConceptScore W3204659946C142724271 @default.
- W3204659946 hasConceptScore W3204659946C162117346 @default.
- W3204659946 hasConceptScore W3204659946C162996421 @default.
- W3204659946 hasConceptScore W3204659946C171250308 @default.
- W3204659946 hasConceptScore W3204659946C177409738 @default.
- W3204659946 hasConceptScore W3204659946C192209626 @default.
- W3204659946 hasConceptScore W3204659946C192562407 @default.
- W3204659946 hasConceptScore W3204659946C195766429 @default.
- W3204659946 hasConceptScore W3204659946C204223013 @default.
- W3204659946 hasConceptScore W3204659946C204787440 @default.
- W3204659946 hasConceptScore W3204659946C2779227376 @default.
- W3204659946 hasConceptScore W3204659946C2779751349 @default.
- W3204659946 hasConceptScore W3204659946C49040817 @default.
- W3204659946 hasConceptScore W3204659946C53524968 @default.
- W3204659946 hasConceptScore W3204659946C71924100 @default.
- W3204659946 hasLocation W32046599461 @default.
- W3204659946 hasOpenAccess W3204659946 @default.
- W3204659946 hasPrimaryLocation W32046599461 @default.
- W3204659946 hasRelatedWork W1986131697 @default.
- W3204659946 hasRelatedWork W1998341457 @default.
- W3204659946 hasRelatedWork W2014150054 @default.
- W3204659946 hasRelatedWork W2031564203 @default.
- W3204659946 hasRelatedWork W2043452673 @default.
- W3204659946 hasRelatedWork W2054801026 @default.
- W3204659946 hasRelatedWork W2092921751 @default.
- W3204659946 hasRelatedWork W2145411830 @default.
- W3204659946 hasRelatedWork W2313872098 @default.
- W3204659946 hasRelatedWork W4367550837 @default.
- W3204659946 isParatext "false" @default.
- W3204659946 isRetracted "false" @default.
- W3204659946 magId "3204659946" @default.
- W3204659946 workType "article" @default.