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• W3204676009 abstract "The article addresses schematic design, fabrication, and modeling of a nonlinear micro resonator for MEMS applications. It exploits a nonlinear suspension system for a proof mass which shows nonlinear stiffness characteristics. The MEMS resonator is designed in such a way that the states of proof mass displacement and velocity are at the access via the novel embedded electro mechanical substructures of the micro resonator and the proposed electronic circuits as well, for control purposes. This feature is obtained while the resonator is equipped with a symmetric electrostatic actuator alongside the differential capacitance detection mechanism. The nonlinear properties of the suspension spring, which is the major source of nonlinear resonance, are demonstrated via simulation. Ultimately, the article theoretically puts forth the stages of the fabrication process in details." @default.
• W3204676009 created "2021-10-11" @default.
• W3204676009 creator A5051730346 @default.
• W3204676009 creator A5062960854 @default.
• W3204676009 date "2021-05-18" @default.
• W3204676009 modified "2023-09-24" @default.
• W3204676009 title "Design of a Controllable and State-Observable MEMS Nonlinear Resonator Based on the Awl-Shaped Serpentine Spring" @default.
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• W3204676009 doi "https://doi.org/10.1109/icee52715.2021.9544134" @default.
• W3204676009 hasPublicationYear "2021" @default.
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