Matches in SemOpenAlex for { <https://semopenalex.org/work/W3204722736> ?p ?o ?g. }
- W3204722736 endingPage "9074" @default.
- W3204722736 startingPage "9074" @default.
- W3204722736 abstract "Pyroelectric infrared sensors incorporating suspended zinc oxide (ZnO) pyroelectric films and thermally insulated silicon substrates are fabricated using conventional MEMS-based thin-film deposition, photolithography, and etching techniques. The responsivity of the pyroelectric films is improved through annealing at a temperature of 500 °C for 4 h. The temperature variation and voltage responsivity of the fabricated sensors are evaluated numerically and experimentally for substrate thickness in the range of 1 to 500 μm. The results show that the temperature variation and voltage responsivity both increase with a reducing substrate thickness. For the lowest film thickness of 1 μm, the sensor achieves a voltage sensitivity of 3880 mV/mW at a cutoff frequency of 400 Hz. In general, the results presented in this study provide a useful source of reference for the further development of MEMS-based pyroelectric infrared sensors." @default.
- W3204722736 created "2021-10-11" @default.
- W3204722736 creator A5021111704 @default.
- W3204722736 creator A5027652208 @default.
- W3204722736 creator A5057731022 @default.
- W3204722736 creator A5074788611 @default.
- W3204722736 date "2021-09-29" @default.
- W3204722736 modified "2023-09-26" @default.
- W3204722736 title "Effect of Substrate-Thickness on Voltage Responsivity of MEMS-Based ZnO Pyroelectric Infrared Sensors" @default.
- W3204722736 cites W1972743364 @default.
- W3204722736 cites W1974016691 @default.
- W3204722736 cites W1984671510 @default.
- W3204722736 cites W1985078729 @default.
- W3204722736 cites W2011314556 @default.
- W3204722736 cites W2013808067 @default.
- W3204722736 cites W2017481848 @default.
- W3204722736 cites W2038718482 @default.
- W3204722736 cites W2039568866 @default.
- W3204722736 cites W2053623075 @default.
- W3204722736 cites W2054944104 @default.
- W3204722736 cites W2061438798 @default.
- W3204722736 cites W2066519890 @default.
- W3204722736 cites W2067212245 @default.
- W3204722736 cites W2081656581 @default.
- W3204722736 cites W2084314918 @default.
- W3204722736 cites W2086872139 @default.
- W3204722736 cites W2090383103 @default.
- W3204722736 cites W2110626966 @default.
- W3204722736 cites W2125530311 @default.
- W3204722736 cites W2130196056 @default.
- W3204722736 cites W2739958267 @default.
- W3204722736 cites W2791446738 @default.
- W3204722736 cites W2980190619 @default.
- W3204722736 cites W3087134262 @default.
- W3204722736 cites W3200425840 @default.
- W3204722736 doi "https://doi.org/10.3390/app11199074" @default.
- W3204722736 hasPublicationYear "2021" @default.
- W3204722736 type Work @default.
- W3204722736 sameAs 3204722736 @default.
- W3204722736 citedByCount "2" @default.
- W3204722736 countsByYear W32047227362023 @default.
- W3204722736 crossrefType "journal-article" @default.
- W3204722736 hasAuthorship W3204722736A5021111704 @default.
- W3204722736 hasAuthorship W3204722736A5027652208 @default.
- W3204722736 hasAuthorship W3204722736A5057731022 @default.
- W3204722736 hasAuthorship W3204722736A5074788611 @default.
- W3204722736 hasBestOaLocation W32047227361 @default.
- W3204722736 hasConcept C105487726 @default.
- W3204722736 hasConcept C111368507 @default.
- W3204722736 hasConcept C119599485 @default.
- W3204722736 hasConcept C120665830 @default.
- W3204722736 hasConcept C121332964 @default.
- W3204722736 hasConcept C127313418 @default.
- W3204722736 hasConcept C127413603 @default.
- W3204722736 hasConcept C133386390 @default.
- W3204722736 hasConcept C158355884 @default.
- W3204722736 hasConcept C165801399 @default.
- W3204722736 hasConcept C178889773 @default.
- W3204722736 hasConcept C182762160 @default.
- W3204722736 hasConcept C192562407 @default.
- W3204722736 hasConcept C23125352 @default.
- W3204722736 hasConcept C2777289219 @default.
- W3204722736 hasConcept C37977207 @default.
- W3204722736 hasConcept C49040817 @default.
- W3204722736 hasConcept C79090758 @default.
- W3204722736 hasConceptScore W3204722736C105487726 @default.
- W3204722736 hasConceptScore W3204722736C111368507 @default.
- W3204722736 hasConceptScore W3204722736C119599485 @default.
- W3204722736 hasConceptScore W3204722736C120665830 @default.
- W3204722736 hasConceptScore W3204722736C121332964 @default.
- W3204722736 hasConceptScore W3204722736C127313418 @default.
- W3204722736 hasConceptScore W3204722736C127413603 @default.
- W3204722736 hasConceptScore W3204722736C133386390 @default.
- W3204722736 hasConceptScore W3204722736C158355884 @default.
- W3204722736 hasConceptScore W3204722736C165801399 @default.
- W3204722736 hasConceptScore W3204722736C178889773 @default.
- W3204722736 hasConceptScore W3204722736C182762160 @default.
- W3204722736 hasConceptScore W3204722736C192562407 @default.
- W3204722736 hasConceptScore W3204722736C23125352 @default.
- W3204722736 hasConceptScore W3204722736C2777289219 @default.
- W3204722736 hasConceptScore W3204722736C37977207 @default.
- W3204722736 hasConceptScore W3204722736C49040817 @default.
- W3204722736 hasConceptScore W3204722736C79090758 @default.
- W3204722736 hasIssue "19" @default.
- W3204722736 hasLocation W32047227361 @default.
- W3204722736 hasLocation W32047227362 @default.
- W3204722736 hasOpenAccess W3204722736 @default.
- W3204722736 hasPrimaryLocation W32047227361 @default.
- W3204722736 hasRelatedWork W1494543304 @default.
- W3204722736 hasRelatedWork W2013413667 @default.
- W3204722736 hasRelatedWork W2030299043 @default.
- W3204722736 hasRelatedWork W2045989630 @default.
- W3204722736 hasRelatedWork W2111891976 @default.
- W3204722736 hasRelatedWork W2383973862 @default.
- W3204722736 hasRelatedWork W2763836796 @default.
- W3204722736 hasRelatedWork W2775024554 @default.
- W3204722736 hasRelatedWork W3008000053 @default.
- W3204722736 hasRelatedWork W4309673505 @default.