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• W3206091391 abstract "Solid state beam steering devices are key elements in low cost, robust, and three-dimensional imaging systems. Here, we present a silicon photonic beam steering device based upon an 8 × 8 grating coupler focal plane array approach fed by a thermo-optic Mach–Zehnder switching tree. In this device, transmission of light from the grating couplers is made through the backside of the chip using topside mirrors allowing for both high-efficiency out-coupling and direct flip-chip integration of drive electronics, providing a path to scale to denser focal plane arrays with large numbers of points in the future. A −13.8 dB fiber-to-fiber transmission was achieved in our preliminary test around 1523 nm for the beam steering chip." @default.
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• W3206091391 date "2021-11-01" @default.
• W3206091391 modified "2023-09-23" @default.
• W3206091391 title "Silicon photonic beam steering module with backside coupling elements towards dense heterogeneous integration with drive electronics" @default.
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• W3206091391 doi "https://doi.org/10.1063/5.0065210" @default.
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