FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3207286914> ?p ?o ?g. }

• W3207286914 endingPage "2676" @default.
• W3207286914 startingPage "2670" @default.
• W3207286914 abstract "Vacuum-air-shift causes trouble to conventional electron beam evaporation (EBE) coatings. This study compares the protection effect of ion assistance and the ALD (atomic layer deposition) Al2O3 capping layer. The vacuum-air-shift was reproduced on an EBE Ta2O5 single-layer film, a Ta2O5/SiO2 double-layer coating, and a high-reflectance mirror. Similar samples were prepared by EBE assisted with ion beam bombardment. Part of the as-deposited coatings were capped by ALD Al2O3 film with a thickness of about 100 nm. The vacuum-air-shift of the samples was tested with an in-situ spectrophotometer. The cross-section of the coatings was imaged by a scanning electron microscope. The ion assistance was found to reduce the vacuum-air-shift to a limit extent, while the ALD capping film was found to eliminate the vacuum-air-shift. The mechanism of the two protection techniques was analyzed, and their usage was compared and discussed. The ALD capping technique may be used in high precision EBE coatings with convenience and low cost." @default.
• W3207286914 created "2021-10-25" @default.
• W3207286914 creator A5008700984 @default.
• W3207286914 creator A5009637030 @default.
• W3207286914 creator A5042465121 @default.
• W3207286914 creator A5051147115 @default.
• W3207286914 creator A5056254289 @default.
• W3207286914 creator A5088664989 @default.
• W3207286914 date "2022-01-01" @default.
• W3207286914 modified "2023-10-16" @default.
• W3207286914 title "Protecting the EBE coatings from vacuum-air-shift by ion assistance or ALD capping layer" @default.
• W3207286914 cites W1971284848 @default.
• W3207286914 cites W1979998983 @default.
• W3207286914 cites W1997127516 @default.
• W3207286914 cites W1997904336 @default.
• W3207286914 cites W1998214070 @default.
• W3207286914 cites W2023562617 @default.
• W3207286914 cites W2332104615 @default.
• W3207286914 cites W2463448811 @default.
• W3207286914 cites W2610244828 @default.
• W3207286914 cites W2805061956 @default.
• W3207286914 cites W2890325596 @default.
• W3207286914 cites W2949598364 @default.
• W3207286914 cites W3017272589 @default.
• W3207286914 cites W4231796723 @default.
• W3207286914 doi "https://doi.org/10.1016/j.ceramint.2021.10.051" @default.
• W3207286914 hasPublicationYear "2022" @default.
• W3207286914 type Work @default.
• W3207286914 sameAs 3207286914 @default.
• W3207286914 citedByCount "1" @default.
• W3207286914 countsByYear W32072869142023 @default.
• W3207286914 crossrefType "journal-article" @default.
• W3207286914 hasAuthorship W3207286914A5008700984 @default.
• W3207286914 hasAuthorship W3207286914A5009637030 @default.
• W3207286914 hasAuthorship W3207286914A5042465121 @default.
• W3207286914 hasAuthorship W3207286914A5051147115 @default.
• W3207286914 hasAuthorship W3207286914A5056254289 @default.
• W3207286914 hasAuthorship W3207286914A5088664989 @default.
• W3207286914 hasConcept C113196181 @default.
• W3207286914 hasConcept C121332964 @default.
• W3207286914 hasConcept C145148216 @default.
• W3207286914 hasConcept C151730666 @default.
• W3207286914 hasConcept C159985019 @default.
• W3207286914 hasConcept C161866238 @default.
• W3207286914 hasConcept C171250308 @default.
• W3207286914 hasConcept C185592680 @default.
• W3207286914 hasConcept C19067145 @default.
• W3207286914 hasConcept C192562407 @default.
• W3207286914 hasConcept C26771246 @default.
• W3207286914 hasConcept C2776873873 @default.
• W3207286914 hasConcept C2779192298 @default.
• W3207286914 hasConcept C2779227376 @default.
• W3207286914 hasConcept C2781448156 @default.
• W3207286914 hasConcept C2781463530 @default.
• W3207286914 hasConcept C2816523 @default.
• W3207286914 hasConcept C43617362 @default.
• W3207286914 hasConcept C50774322 @default.
• W3207286914 hasConcept C61441594 @default.
• W3207286914 hasConcept C62520636 @default.
• W3207286914 hasConcept C64297162 @default.
• W3207286914 hasConcept C69544855 @default.
• W3207286914 hasConcept C7770020 @default.
• W3207286914 hasConcept C82225425 @default.
• W3207286914 hasConcept C86803240 @default.
• W3207286914 hasConcept C97355855 @default.
• W3207286914 hasConceptScore W3207286914C113196181 @default.
• W3207286914 hasConceptScore W3207286914C121332964 @default.
• W3207286914 hasConceptScore W3207286914C145148216 @default.
• W3207286914 hasConceptScore W3207286914C151730666 @default.
• W3207286914 hasConceptScore W3207286914C159985019 @default.
• W3207286914 hasConceptScore W3207286914C161866238 @default.
• W3207286914 hasConceptScore W3207286914C171250308 @default.
• W3207286914 hasConceptScore W3207286914C185592680 @default.
• W3207286914 hasConceptScore W3207286914C19067145 @default.
• W3207286914 hasConceptScore W3207286914C192562407 @default.
• W3207286914 hasConceptScore W3207286914C26771246 @default.
• W3207286914 hasConceptScore W3207286914C2776873873 @default.
• W3207286914 hasConceptScore W3207286914C2779192298 @default.
• W3207286914 hasConceptScore W3207286914C2779227376 @default.
• W3207286914 hasConceptScore W3207286914C2781448156 @default.
• W3207286914 hasConceptScore W3207286914C2781463530 @default.
• W3207286914 hasConceptScore W3207286914C2816523 @default.
• W3207286914 hasConceptScore W3207286914C43617362 @default.
• W3207286914 hasConceptScore W3207286914C50774322 @default.
• W3207286914 hasConceptScore W3207286914C61441594 @default.
• W3207286914 hasConceptScore W3207286914C62520636 @default.
• W3207286914 hasConceptScore W3207286914C64297162 @default.
• W3207286914 hasConceptScore W3207286914C69544855 @default.
• W3207286914 hasConceptScore W3207286914C7770020 @default.
• W3207286914 hasConceptScore W3207286914C82225425 @default.
• W3207286914 hasConceptScore W3207286914C86803240 @default.
• W3207286914 hasConceptScore W3207286914C97355855 @default.
• W3207286914 hasFunder F4320326705 @default.
• W3207286914 hasIssue "2" @default.
• W3207286914 hasLocation W32072869141 @default.
• W3207286914 hasOpenAccess W3207286914 @default.
• W3207286914 hasPrimaryLocation W32072869141 @default.
• W3207286914 hasRelatedWork W1033053438 @default.

• next