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• W3207650282 abstract "To contemplate an alternative approach for the minimization of diffusion at high temperature depositions, present findings impart viability of room-temperature deposited reactively sputtered ScN thin film samples. The adopted room temperature route endows precise control over the {rn} flow for a methodical structural phase evolution from Sc$ rightarrow $ScN and probe the correlated physical aspects of the highly textured ScN samples. In the nitrided regime i.e. at {rn} = 2.5~-~100{p} flow, incorporation of unintentional oxygen defects were evidenced from surface sensitive soft x-ray absorption spectroscopy study, though less compared to their metal ({rn} = 0{p}) and interstitial ({rn} = 1.6{p}) counterparts, due to higher Gibb's free energy for Sc-O-N formation with no trace of ligand field splitting around the O K-edge spectra. To eradicate the sceptism of appearance of N K-edge (401.6,eV) and Sc L-edge (402.2,eV) absorption spectra adjacent to each other, the nascent Sc K-edge study has been adopted for the first time to validate complementary insight on the metrical parameters of the Sc-N system taken into consideration. Optical bandgaps of the polycrystalline ScN thin film samples were found to vary between 2.25~-~2.62,eV as obtained from the UV-Vis spectroscopy, whereas, the nano-indentation hardness and modulus of the as-deposited samples lie between 15~-~34,GPa and 152~-~476,GPa, respectively following a linearly increasing trend of resistance to plastic deformations. Besides, contrary to other early 3d transition metal nitrides (TiN, VN, CrN), a comprehensive comparison of noticeably large homogeneity range in Sc-N has been outlined to apprehend the minuscule lattice expansion over the large {rn} realm." @default.
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• W3207650282 date "2021-10-08" @default.
• W3207650282 modified "2023-09-27" @default.
• W3207650282 title "Synthesis and study of ScN thin films" @default.
• W3207650282 hasPublicationYear "2021" @default.
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