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• W3207685462 endingPage "104878" @default.
• W3207685462 startingPage "104878" @default.
• W3207685462 abstract "Variation of FWHM and Ra (surface roughness) of Ir buffer layer on MgO support layer with deposition time were found. • The Logistic function between deposition time and FWHM of Ir(2 0 0) was observed. • The Lorentz function between deposition time and surface roughness R a was observed. • The growth mode of Ir buffer layer is obtained and its growth mechanism is explained. • Provides a new idea of using the fitting function to predict the best process. The effects of deposition time of Ir buffer layer on MgO(1 0 0) support layer were investigated during the fabrication of the Ir/MgO compliant substrates with the use of the magnetron sputtering technique. It was observed that the XRD FWHM of Ir(2 0 0) decreases rapidly at first and then slowly with increasing deposition time, and the XRD FWHM data versus the deposition time can be fitted into the Logistic curve. For the surface roughness R a of the Ir buffer layer, it increases firstly and then declines with increasing deposition time; the experimental data of R a versus the deposition time can be fitted to the Lorentz curve. And the fitting functions corresponding to the two curves can be used for the determination of the deposition time of desired Ir buffer layer quality easily and conveniently, which provides a solid foundation for subsequent heteroepitaxy of high-quality diamond films on the Ir/MgO compliant substrate." @default.
• W3207685462 created "2021-10-25" @default.
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• W3207685462 date "2021-11-01" @default.
• W3207685462 modified "2023-10-01" @default.
• W3207685462 title "Effects of deposition time on growth of Ir buffer layer on MgO(1 0 0) support layer by magnetron sputtering" @default.
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• W3207685462 doi "https://doi.org/10.1016/j.rinp.2021.104878" @default.
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