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- W3208015111 abstract "This paper presents the design and the analysis of Single-Pole-Single- Throw (SPST) switches based on Micro-Electro-Mechanical-Systems technology for Radio Frequencies applications (RF-MEMS). The switches are of series ohmic type, and they are framed within a coplanar waveguide (CPW) configuration. The proposed switches are provided with meander-shaped suspending beams, targeting a reduced actuation voltage and a design minimally subjected to nonidealities, such as deformations due to residual stress built within thin-films during the fabrication process. This design arrangement allowed the devices to demonstrate a simulated actuation voltage in the 4–8 V range, and an actuation time in the range of <tex xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>$10-20 mumathrm{s}$</tex> . In terms of electrical features, the devices have been simulated up to 60 GHz, exhibiting a < -2 dB Insertion Loss up to 37 GHz, and < -9 dB Return Loss along the whole range. The electro-mechanical properties of the switches have been investigated by means of Ansys Workbench, while its RF electrical performances have been assessed by Ansys HFSS." @default.
- W3208015111 created "2021-11-08" @default.
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- W3208015111 date "2021-09-12" @default.
- W3208015111 modified "2023-09-26" @default.
- W3208015111 title "Design and Analysis of RF - MEMS Switches with Meandered Beams for Reduced Actuation Voltage" @default.
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- W3208015111 doi "https://doi.org/10.1109/miel52794.2021.9569074" @default.
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