Matches in SemOpenAlex for { <https://semopenalex.org/work/W3208142757> ?p ?o ?g. }
Showing items 1 to 76 of
76
with 100 items per page.
- W3208142757 abstract "Abstract This paper explains how tunneling atomic force microscopy (AFM) was used to determine the cause of leakage in FinFETs along the boundary of SRAM cells. The leaking devices were electrically isolated using photoemission microscopy, but conventional FA techniques, including SEM and TEM imaging, found no structural abnormalities. Suspecting that the failures may be due to dopant-related issues, the authors obtained cross sections of both good and bad devices and scanned them in a tunneling AFM. The paper describes the sample preparation process and includes cross-sectional images showing the difference between good and bad transistors. In SRAM areas where no leakage occurred, the fins are well defined and evenly spaced. However, in the area where an emission spot was observed, two of the fins appear to be overlapping, the result of n-well implants that merged." @default.
- W3208142757 created "2021-11-08" @default.
- W3208142757 creator A5009154750 @default.
- W3208142757 creator A5016119637 @default.
- W3208142757 creator A5024550249 @default.
- W3208142757 creator A5027356207 @default.
- W3208142757 creator A5038286110 @default.
- W3208142757 creator A5072829257 @default.
- W3208142757 creator A5076139232 @default.
- W3208142757 date "2021-10-31" @default.
- W3208142757 modified "2023-09-23" @default.
- W3208142757 title "Non-Visual Defect Identification by Dopant Analysis Method in FinFET Devices" @default.
- W3208142757 doi "https://doi.org/10.31399/asm.cp.istfa2021p0359" @default.
- W3208142757 hasPublicationYear "2021" @default.
- W3208142757 type Work @default.
- W3208142757 sameAs 3208142757 @default.
- W3208142757 citedByCount "0" @default.
- W3208142757 crossrefType "proceedings-article" @default.
- W3208142757 hasAuthorship W3208142757A5009154750 @default.
- W3208142757 hasAuthorship W3208142757A5016119637 @default.
- W3208142757 hasAuthorship W3208142757A5024550249 @default.
- W3208142757 hasAuthorship W3208142757A5027356207 @default.
- W3208142757 hasAuthorship W3208142757A5038286110 @default.
- W3208142757 hasAuthorship W3208142757A5072829257 @default.
- W3208142757 hasAuthorship W3208142757A5076139232 @default.
- W3208142757 hasConcept C102951782 @default.
- W3208142757 hasConcept C119599485 @default.
- W3208142757 hasConcept C120398109 @default.
- W3208142757 hasConcept C127413603 @default.
- W3208142757 hasConcept C139719470 @default.
- W3208142757 hasConcept C162324750 @default.
- W3208142757 hasConcept C165801399 @default.
- W3208142757 hasConcept C171250308 @default.
- W3208142757 hasConcept C172385210 @default.
- W3208142757 hasConcept C191952053 @default.
- W3208142757 hasConcept C192562407 @default.
- W3208142757 hasConcept C24326235 @default.
- W3208142757 hasConcept C2777042071 @default.
- W3208142757 hasConcept C49040817 @default.
- W3208142757 hasConcept C57863236 @default.
- W3208142757 hasConcept C6518042 @default.
- W3208142757 hasConcept C68043766 @default.
- W3208142757 hasConceptScore W3208142757C102951782 @default.
- W3208142757 hasConceptScore W3208142757C119599485 @default.
- W3208142757 hasConceptScore W3208142757C120398109 @default.
- W3208142757 hasConceptScore W3208142757C127413603 @default.
- W3208142757 hasConceptScore W3208142757C139719470 @default.
- W3208142757 hasConceptScore W3208142757C162324750 @default.
- W3208142757 hasConceptScore W3208142757C165801399 @default.
- W3208142757 hasConceptScore W3208142757C171250308 @default.
- W3208142757 hasConceptScore W3208142757C172385210 @default.
- W3208142757 hasConceptScore W3208142757C191952053 @default.
- W3208142757 hasConceptScore W3208142757C192562407 @default.
- W3208142757 hasConceptScore W3208142757C24326235 @default.
- W3208142757 hasConceptScore W3208142757C2777042071 @default.
- W3208142757 hasConceptScore W3208142757C49040817 @default.
- W3208142757 hasConceptScore W3208142757C57863236 @default.
- W3208142757 hasConceptScore W3208142757C6518042 @default.
- W3208142757 hasConceptScore W3208142757C68043766 @default.
- W3208142757 hasLocation W32081427571 @default.
- W3208142757 hasOpenAccess W3208142757 @default.
- W3208142757 hasPrimaryLocation W32081427571 @default.
- W3208142757 hasRelatedWork W10177512 @default.
- W3208142757 hasRelatedWork W10717963 @default.
- W3208142757 hasRelatedWork W11747327 @default.
- W3208142757 hasRelatedWork W11917949 @default.
- W3208142757 hasRelatedWork W1581894 @default.
- W3208142757 hasRelatedWork W2825812 @default.
- W3208142757 hasRelatedWork W3690092 @default.
- W3208142757 hasRelatedWork W4398084 @default.
- W3208142757 hasRelatedWork W4980488 @default.
- W3208142757 hasRelatedWork W668479 @default.
- W3208142757 isParatext "false" @default.
- W3208142757 isRetracted "false" @default.
- W3208142757 magId "3208142757" @default.
- W3208142757 workType "article" @default.