Matches in SemOpenAlex for { <https://semopenalex.org/work/W3208353949> ?p ?o ?g. }
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- W3208353949 endingPage "262" @default.
- W3208353949 startingPage "248" @default.
- W3208353949 abstract "Here, we report measurements made with an external vibration-insensitive single-shot interferometer, which is applicable for on-machine measurement. Previously, we developed a simple single-shot interferometry method in which the optical intensities of interference fringes appear not as sinusoidal distributions but have a sawtooth-like distribution, and the peak distortion direction depicts the slope of the measured surfaces. These properties allow use of this method in vibration-insensitive interferometry. In this study, we have experimentally confirmed this concept through measurement of a quarter of a Si wafer specimen 50 mm in diameter. The vibration source was a motorized linear stage the surface of which fluctuated between ±400 nm in height. The obtained surface profiles of the Si wafer were consistent with measurements made with a commercial interferometer within 30 nm. • A novel vibration-resistant optical interferometry method was achieved. • Metal was deposited on one surface of a glass reference plate. • Optical intensity of interference fringe has a sawtooth-like distribution. • A single interferogram is sufficient for determination of surface inclination. • Measured profiles were coincident with target values within 30 nm." @default.
- W3208353949 created "2021-11-08" @default.
- W3208353949 creator A5049911033 @default.
- W3208353949 creator A5065964517 @default.
- W3208353949 date "2022-05-01" @default.
- W3208353949 modified "2023-09-29" @default.
- W3208353949 title "Vibration insensitive single-shot interferometry using a wide-field laser microscope" @default.
- W3208353949 cites W1967653581 @default.
- W3208353949 cites W1990503574 @default.
- W3208353949 cites W2009518030 @default.
- W3208353949 cites W2025397186 @default.
- W3208353949 cites W2048671634 @default.
- W3208353949 cites W2055290452 @default.
- W3208353949 cites W2072102917 @default.
- W3208353949 cites W2084349857 @default.
- W3208353949 cites W2111787976 @default.
- W3208353949 cites W2127996129 @default.
- W3208353949 cites W2132706959 @default.
- W3208353949 cites W2324608522 @default.
- W3208353949 cites W2571981741 @default.
- W3208353949 cites W2575448081 @default.
- W3208353949 cites W2579809063 @default.
- W3208353949 cites W2592067974 @default.
- W3208353949 cites W2793597444 @default.
- W3208353949 cites W2916329236 @default.
- W3208353949 doi "https://doi.org/10.1016/j.precisioneng.2021.10.012" @default.
- W3208353949 hasPublicationYear "2022" @default.
- W3208353949 type Work @default.
- W3208353949 sameAs 3208353949 @default.
- W3208353949 citedByCount "0" @default.
- W3208353949 crossrefType "journal-article" @default.
- W3208353949 hasAuthorship W3208353949A5049911033 @default.
- W3208353949 hasAuthorship W3208353949A5065964517 @default.
- W3208353949 hasBestOaLocation W32083539491 @default.
- W3208353949 hasConcept C120665830 @default.
- W3208353949 hasConcept C121332964 @default.
- W3208353949 hasConcept C166689943 @default.
- W3208353949 hasConcept C191897082 @default.
- W3208353949 hasConcept C192562407 @default.
- W3208353949 hasConcept C198394728 @default.
- W3208353949 hasConcept C24890656 @default.
- W3208353949 hasConcept C2778344882 @default.
- W3208353949 hasConcept C3019835501 @default.
- W3208353949 hasConcept C520434653 @default.
- W3208353949 hasConcept C67649825 @default.
- W3208353949 hasConceptScore W3208353949C120665830 @default.
- W3208353949 hasConceptScore W3208353949C121332964 @default.
- W3208353949 hasConceptScore W3208353949C166689943 @default.
- W3208353949 hasConceptScore W3208353949C191897082 @default.
- W3208353949 hasConceptScore W3208353949C192562407 @default.
- W3208353949 hasConceptScore W3208353949C198394728 @default.
- W3208353949 hasConceptScore W3208353949C24890656 @default.
- W3208353949 hasConceptScore W3208353949C2778344882 @default.
- W3208353949 hasConceptScore W3208353949C3019835501 @default.
- W3208353949 hasConceptScore W3208353949C520434653 @default.
- W3208353949 hasConceptScore W3208353949C67649825 @default.
- W3208353949 hasFunder F4320334764 @default.
- W3208353949 hasLocation W32083539491 @default.
- W3208353949 hasOpenAccess W3208353949 @default.
- W3208353949 hasPrimaryLocation W32083539491 @default.
- W3208353949 hasRelatedWork W1991857501 @default.
- W3208353949 hasRelatedWork W2009756911 @default.
- W3208353949 hasRelatedWork W2071370835 @default.
- W3208353949 hasRelatedWork W2072310978 @default.
- W3208353949 hasRelatedWork W2073426596 @default.
- W3208353949 hasRelatedWork W2083770598 @default.
- W3208353949 hasRelatedWork W2084169331 @default.
- W3208353949 hasRelatedWork W2127131880 @default.
- W3208353949 hasRelatedWork W292711273 @default.
- W3208353949 hasRelatedWork W4311207979 @default.
- W3208353949 hasVolume "75" @default.
- W3208353949 isParatext "false" @default.
- W3208353949 isRetracted "false" @default.
- W3208353949 magId "3208353949" @default.
- W3208353949 workType "article" @default.