Matches in SemOpenAlex for { <https://semopenalex.org/work/W3208520706> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W3208520706 abstract "In the field of high brightness LED, the requirements of miniaturization, output and yield are urgent. At the same time, low k dielectric layers are more and more widely applied in integrated circuit filed, in order to solve the problem of crosstalk and stray capacitance. Laser grooving technology is developed and be seen as an ideal solution for high brightness LED wafer and low-k wafer dicing. Because the chips dicing by non-contact laser grooving technology always have fewer defects than traditional blade sawing technology, such as surface chipping, backside chipping, metal peeling, inside cracks, and delamination. In this paper, two water-soluble adhesives containing different light absorbents are used in laser dicing process. Both adhesives have excellent absorption of special wave length light, and perfect wetting ability with substrates. In the LED wafers UV laser dicing, adhesive named LGP1020 can achieve a good dicing protective efficacy and no crack formed. The low-k wafer protected by LGP2020 after green laser grooving, chips are all in perfect condition. And the protective adhesive would not to be serious carbonized which difficult to clean, even if the power of the green light laser up to 7W. Experiment results show that both adhesives have a perfect protective effect and a widely usage range of laser power." @default.
- W3208520706 created "2021-11-08" @default.
- W3208520706 creator A5004861529 @default.
- W3208520706 creator A5030089267 @default.
- W3208520706 creator A5035590175 @default.
- W3208520706 creator A5054991316 @default.
- W3208520706 creator A5075618045 @default.
- W3208520706 creator A5084404002 @default.
- W3208520706 date "2021-09-14" @default.
- W3208520706 modified "2023-09-24" @default.
- W3208520706 title "Novel water-soluble protective adhesive for wafer's laser dicing" @default.
- W3208520706 cites W2063804725 @default.
- W3208520706 cites W2074454798 @default.
- W3208520706 cites W2077701772 @default.
- W3208520706 cites W2150718185 @default.
- W3208520706 cites W2155931441 @default.
- W3208520706 cites W2162325862 @default.
- W3208520706 cites W2528106691 @default.
- W3208520706 cites W2534818647 @default.
- W3208520706 cites W3010832630 @default.
- W3208520706 doi "https://doi.org/10.1109/icept52650.2021.9567994" @default.
- W3208520706 hasPublicationYear "2021" @default.
- W3208520706 type Work @default.
- W3208520706 sameAs 3208520706 @default.
- W3208520706 citedByCount "0" @default.
- W3208520706 crossrefType "proceedings-article" @default.
- W3208520706 hasAuthorship W3208520706A5004861529 @default.
- W3208520706 hasAuthorship W3208520706A5030089267 @default.
- W3208520706 hasAuthorship W3208520706A5035590175 @default.
- W3208520706 hasAuthorship W3208520706A5054991316 @default.
- W3208520706 hasAuthorship W3208520706A5075618045 @default.
- W3208520706 hasAuthorship W3208520706A5084404002 @default.
- W3208520706 hasConcept C120665830 @default.
- W3208520706 hasConcept C121332964 @default.
- W3208520706 hasConcept C159985019 @default.
- W3208520706 hasConcept C160671074 @default.
- W3208520706 hasConcept C165013422 @default.
- W3208520706 hasConcept C192562407 @default.
- W3208520706 hasConcept C2779227376 @default.
- W3208520706 hasConcept C49040817 @default.
- W3208520706 hasConcept C520434653 @default.
- W3208520706 hasConcept C68928338 @default.
- W3208520706 hasConceptScore W3208520706C120665830 @default.
- W3208520706 hasConceptScore W3208520706C121332964 @default.
- W3208520706 hasConceptScore W3208520706C159985019 @default.
- W3208520706 hasConceptScore W3208520706C160671074 @default.
- W3208520706 hasConceptScore W3208520706C165013422 @default.
- W3208520706 hasConceptScore W3208520706C192562407 @default.
- W3208520706 hasConceptScore W3208520706C2779227376 @default.
- W3208520706 hasConceptScore W3208520706C49040817 @default.
- W3208520706 hasConceptScore W3208520706C520434653 @default.
- W3208520706 hasConceptScore W3208520706C68928338 @default.
- W3208520706 hasFunder F4320321001 @default.
- W3208520706 hasLocation W32085207061 @default.
- W3208520706 hasOpenAccess W3208520706 @default.
- W3208520706 hasPrimaryLocation W32085207061 @default.
- W3208520706 hasRelatedWork W1963684115 @default.
- W3208520706 hasRelatedWork W2017372336 @default.
- W3208520706 hasRelatedWork W2062276134 @default.
- W3208520706 hasRelatedWork W2081367125 @default.
- W3208520706 hasRelatedWork W2316994218 @default.
- W3208520706 hasRelatedWork W2366970374 @default.
- W3208520706 hasRelatedWork W2613021300 @default.
- W3208520706 hasRelatedWork W2935727321 @default.
- W3208520706 hasRelatedWork W3134027146 @default.
- W3208520706 hasRelatedWork W90349556 @default.
- W3208520706 isParatext "false" @default.
- W3208520706 isRetracted "false" @default.
- W3208520706 magId "3208520706" @default.
- W3208520706 workType "article" @default.