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- W3208538047 abstract "We demonstrate two-dimensional photonic crystal cavities operating at telecommunication wavelengths in a single-crystal diamond membrane. We use a high-optical-quality and thin (~ 300 nm) diamond membrane, supported by a polycrystalline diamond frame, to realize fully suspended two-dimensional photonic crystal cavities with a high theoretical quality factor of ~ $8times10^6$ and a relatively small mode volume of ~2$({lambda}/n)^3$. The cavities are fabricated in the membrane using electron-beam lithography and vertical dry etching. We observe cavity resonances over a wide wavelength range spanning the telecommunication O- and S-bands (1360 nm-1470 nm) with Q factors of up to ~1800. Our method offers a new direction for on-chip diamond nanophotonic applications in the telecommunication-wavelength range." @default.
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- W3208538047 date "2021-10-25" @default.
- W3208538047 modified "2023-10-03" @default.
- W3208538047 title "Telecommunication-wavelength two-dimensional photonic crystal cavities in a thin single-crystal diamond membrane" @default.
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- W3208538047 doi "https://doi.org/10.1063/5.0061778" @default.
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