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- W3209163075 abstract "This article mainly introduces our research group’s latest progress in THz camera. Nb <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>5</inf> N <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>6</inf> film is a THz sensitive material and has a significant prospect in THz detection. We use this material to fabricate an antenna coupled microbolometer THz detector array at room temperature, and integrated 180 nm CMOS process readout circuit. The THz camera has a resolution of 32×32, pixel size of 250×250 μm, frame rate of 30, working range is 0.25-1 THz. Compared with the type of pyro-electric infrared camera, below 1 THz terahertz spectrum has significant advantages, with a higher response rate and a lower NEP." @default.
- W3209163075 created "2021-11-08" @default.
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- W3209163075 date "2021-08-29" @default.
- W3209163075 modified "2023-10-16" @default.
- W3209163075 title "An Nb5N6 microbolometer THz camera" @default.
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- W3209163075 doi "https://doi.org/10.1109/irmmw-thz50926.2021.9567095" @default.
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