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- W3209705597 abstract "This paper studied the radiation hardness of InAs Quantum Dot(QD) embedded in high electron mobility transistor (HEMT) for force-sensitive structure, and further verified its high irradiation properties and high sensitivity. The transfer characteristics, output characteristics, structural changes and force-sensitivity of InAs QD-HEMT and HEMT structure are analyzed after irradiated with 1900-Mev <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>181</sup> Ta ions at different fluences. The experiment results of electrical characterization indicated that the radiation hardness of InAs QD-HEMT was 3.5 times higher than that of HEMT. The mechanical sensitivity of pristine InAs QD-HEMT structure was 0.153 mA/KPa, which was higher than that of pristine HEMT structure by 0.088mA/KPa, and the force-sensitivity of InAs QD-HEMT structure was less affected by irradiation. The results indicate that InAs QD-HEMT force-sensitive structure has a strong tolerance to heavy ion irradiation. The irradiation hardens, and force-sensitive characteristics of the device can be improved by using InAs QD-HEMT structure, which can provide radiation protection for MEMS sensors applied in a harsh radiation environment." @default.
- W3209705597 created "2021-11-08" @default.
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- W3209705597 date "2021-10-15" @default.
- W3209705597 modified "2023-10-18" @default.
- W3209705597 title "The Radiation Hardness of Quantum Dot Embedded in High Electron Mobility Transistor Force-Sensitive Structure" @default.
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- W3209705597 doi "https://doi.org/10.1109/jsen.2021.3107859" @default.
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