Matches in SemOpenAlex for { <https://semopenalex.org/work/W3209773775> ?p ?o ?g. }
- W3209773775 endingPage "110698" @default.
- W3209773775 startingPage "110698" @default.
- W3209773775 abstract "The influence of the choice of process parameters in an industrial high-power impulse magnetron sputtering (HiPIMS) system on the surface roughness and crystallinity of Ti coatings is presented in this work. A current density of 1 A/cm2 was kept constant by varying the pulse frequency to control the average power. The films were characterised by scanning electron microscopy, atomic force microscopy, X-ray diffraction and transmission electron microscopy. The surface roughness, residual stress and grain size are discussed as a function of the HiPIMS target average power in the 1.45–7.90 kW range. The surface roughness, ranging from 14 to 24 nm, is lower than that of the SnO2 glass substrate, and has a non-linear dependence on the HiPIMS power. X-ray 2θ diffraction shows (100), (001) and (101) orientation of the film crystallites. The peak shifts reveal a gradual reduction in residual stress as target power increases. Further, the effect of target power on crystal grain length and geometric orientation is also determined." @default.
- W3209773775 created "2021-11-08" @default.
- W3209773775 creator A5005958938 @default.
- W3209773775 creator A5022574371 @default.
- W3209773775 creator A5030359835 @default.
- W3209773775 creator A5033261007 @default.
- W3209773775 creator A5064179326 @default.
- W3209773775 creator A5069254724 @default.
- W3209773775 creator A5069610590 @default.
- W3209773775 creator A5088493129 @default.
- W3209773775 date "2022-01-01" @default.
- W3209773775 modified "2023-09-25" @default.
- W3209773775 title "Ti thin films deposited by high-power impulse magnetron sputtering in an industrial system: Process parameters for a low surface roughness" @default.
- W3209773775 cites W1530903184 @default.
- W3209773775 cites W1964681681 @default.
- W3209773775 cites W1996139136 @default.
- W3209773775 cites W2008920476 @default.
- W3209773775 cites W2012527731 @default.
- W3209773775 cites W2021678721 @default.
- W3209773775 cites W2022553468 @default.
- W3209773775 cites W2023865885 @default.
- W3209773775 cites W2028925715 @default.
- W3209773775 cites W2029425779 @default.
- W3209773775 cites W2040179900 @default.
- W3209773775 cites W2051944828 @default.
- W3209773775 cites W2054772024 @default.
- W3209773775 cites W2058324708 @default.
- W3209773775 cites W2059144383 @default.
- W3209773775 cites W2061508274 @default.
- W3209773775 cites W2062288860 @default.
- W3209773775 cites W2070837693 @default.
- W3209773775 cites W2073365690 @default.
- W3209773775 cites W2073658371 @default.
- W3209773775 cites W2078833627 @default.
- W3209773775 cites W2090071143 @default.
- W3209773775 cites W2093730316 @default.
- W3209773775 cites W2095826287 @default.
- W3209773775 cites W2109606373 @default.
- W3209773775 cites W2119767240 @default.
- W3209773775 cites W2123643936 @default.
- W3209773775 cites W2140458390 @default.
- W3209773775 cites W2146557039 @default.
- W3209773775 cites W2147824048 @default.
- W3209773775 cites W2147894069 @default.
- W3209773775 cites W2217173632 @default.
- W3209773775 cites W2327069430 @default.
- W3209773775 cites W2344431215 @default.
- W3209773775 cites W2410430911 @default.
- W3209773775 cites W2488726483 @default.
- W3209773775 cites W2567972526 @default.
- W3209773775 cites W2594931990 @default.
- W3209773775 cites W2600181206 @default.
- W3209773775 cites W2789517172 @default.
- W3209773775 cites W2793337594 @default.
- W3209773775 cites W2802011962 @default.
- W3209773775 cites W2810183254 @default.
- W3209773775 cites W2887690287 @default.
- W3209773775 cites W2909236707 @default.
- W3209773775 cites W2949315159 @default.
- W3209773775 cites W2969607335 @default.
- W3209773775 cites W2981222813 @default.
- W3209773775 cites W2985289811 @default.
- W3209773775 cites W3002716497 @default.
- W3209773775 cites W3003652634 @default.
- W3209773775 cites W3011765330 @default.
- W3209773775 cites W3012090791 @default.
- W3209773775 cites W3012419155 @default.
- W3209773775 cites W3016674947 @default.
- W3209773775 cites W3021787498 @default.
- W3209773775 cites W3097389883 @default.
- W3209773775 cites W3103696089 @default.
- W3209773775 cites W3138266781 @default.
- W3209773775 cites W3157465223 @default.
- W3209773775 doi "https://doi.org/10.1016/j.vacuum.2021.110698" @default.
- W3209773775 hasPublicationYear "2022" @default.
- W3209773775 type Work @default.
- W3209773775 sameAs 3209773775 @default.
- W3209773775 citedByCount "6" @default.
- W3209773775 countsByYear W32097737752022 @default.
- W3209773775 countsByYear W32097737752023 @default.
- W3209773775 crossrefType "journal-article" @default.
- W3209773775 hasAuthorship W3209773775A5005958938 @default.
- W3209773775 hasAuthorship W3209773775A5022574371 @default.
- W3209773775 hasAuthorship W3209773775A5030359835 @default.
- W3209773775 hasAuthorship W3209773775A5033261007 @default.
- W3209773775 hasAuthorship W3209773775A5064179326 @default.
- W3209773775 hasAuthorship W3209773775A5069254724 @default.
- W3209773775 hasAuthorship W3209773775A5069610590 @default.
- W3209773775 hasAuthorship W3209773775A5088493129 @default.
- W3209773775 hasBestOaLocation W32097737751 @default.
- W3209773775 hasConcept C107365816 @default.
- W3209773775 hasConcept C120665830 @default.
- W3209773775 hasConcept C121332964 @default.
- W3209773775 hasConcept C137637335 @default.
- W3209773775 hasConcept C146088050 @default.
- W3209773775 hasConcept C159985019 @default.
- W3209773775 hasConcept C171250308 @default.
- W3209773775 hasConcept C19067145 @default.