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- W3210036713 abstract "The volume-averaged global plasma model has been widely used to obtain spatially averaged plasma parameters on geometry or process parameters such as applied power, pressure, and gas flow. The characteristics of the plasma are determined by the particle and power balance within the discharge with assuming that all plasma parameters are to be volume averaged. Due to neglected spatial variations, the global model encompasses a large number of reactions in order to model high density plasmas with limited computing power. Therefore, we developed the volume-averaged global plasma simulator (VAGPS) using the free libraries to solve the governing equations and to develop the user interface. Source codes are free to use, copy, modify, merge, publish and distribution except for commercial purposes." @default.
- W3210036713 created "2021-11-08" @default.
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- W3210036713 date "2018-06-24" @default.
- W3210036713 modified "2023-09-26" @default.
- W3210036713 title "VAGPS: Volume-Averaged Global Plasma Simulator for Low Temperature Plasma Sources" @default.
- W3210036713 doi "https://doi.org/10.1109/icops35962.2018.9575421" @default.
- W3210036713 hasPublicationYear "2018" @default.
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