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- W3212373485 abstract "In this paper, we demonstrate a first-order antisymmetric (A1) mode z-cut LiNbO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</inf> thin film resonator with arc shaped electrode. Arc shaped electrodes are only adopted on the top of the LiNbO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</inf> thin film piezoelectric material, and the positive and negative voltage is applied alternately to excite A1 mode in the piezoelectric layer. Some parametric finite element simulations are also presented in this paper. We simulated and fabricated the resonators operating at 6 GHz with an electromechanical coupling coefficient ( <tex xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>$K^{2}{_{eff}}$</tex> ) of 17.97% and extracted quality factor (Q) of 975. This achievement provides a potential solution to satisfy the needs of high frequency and large bandwidth." @default.
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- W3212373485 date "2021-09-11" @default.
- W3212373485 modified "2023-09-30" @default.
- W3212373485 title "Lithium Niobate Film Based Acoustic Wave Resonator with Arc Shaped Electrodes" @default.
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- W3212373485 doi "https://doi.org/10.1109/ius52206.2021.9593326" @default.
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