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- W3214180585 abstract "Organometallic precursors for atomic layer deposition (ALD) that have metal atoms bound to cyclopentadienyl, are stored at a sufficiently high temperature due to their low volatility and consumed through continuous deposition for a commercial semiconductor process. In this case, thermal degradation slowly occurs due to storage at a high temperature for a long time, which causes deterioration of physical properties and reliability of the thin film. However, a technique for assessing the reliability of precursor has been undeveloped and thus causing the development of new precursors to be delayed. In this study, we have developed a reliability evaluation method for cyclopean-tadienyl tris(dimethylamino) zirconium through accelerated thermal degradation test under severe environmental conditions in a short period of time." @default.
- W3214180585 created "2021-11-22" @default.
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- W3214180585 date "2018-01-01" @default.
- W3214180585 modified "2023-09-24" @default.
- W3214180585 title "2SC-8 : Thermal stability and reliability assessment of zirconium ALD precursor" @default.
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