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• W3216578717 endingPage "A14" @default.
• W3216578717 startingPage "A14" @default.
• W3216578717 abstract "The emerging fields of silicon (Si) photonic micro–electromechanical systems (MEMS) and optomechanics enable a wide range of novel high-performance photonic devices with ultra-low power consumption, such as integrated optical MEMS phase shifters, tunable couplers, switches, and optomechanical resonators. In contrast to conventional <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline id=m1> <mml:mrow> <mml:msub> <mml:mrow> <mml:mi>SiO</mml:mi> </mml:mrow> <mml:mn>2</mml:mn> </mml:msub> </mml:mrow> </mml:math> -clad Si photonics, photonic MEMS and optomechanics have suspended and movable parts that need to be protected from environmental influence and contamination during operation. Wafer-level hermetic sealing can be a cost-efficient solution, but Si photonic MEMS that are hermetically sealed inside cavities with optical and electrical feedthroughs have not been demonstrated to date, to our knowledge. Here, we demonstrate wafer-level vacuum sealing of Si photonic MEMS inside cavities with ultra-thin caps featuring optical and electrical feedthroughs that connect the photonic MEMS on the inside to optical grating couplers and electrical bond pads on the outside. We used Si photonic MEMS devices built on foundry wafers from the iSiPP50G Si photonics platform of IMEC, Belgium. Vacuum confinement inside the sealed cavities was confirmed by an observed increase of the cutoff frequency of the electro-mechanical response of the encapsulated photonic MEMS phase shifters, due to reduction of air damping. The sealing caps are extremely thin, have a small footprint, and are compatible with subsequent flip-chip bonding onto interposers or printed circuit boards. Thus, our approach for sealing of integrated Si photonic MEMS clears a significant hurdle for their application in high-performance Si photonic circuits." @default.
• W3216578717 created "2021-12-06" @default.
• W3216578717 creator A5006681830 @default.
• W3216578717 creator A5008851251 @default.
• W3216578717 creator A5015197676 @default.
• W3216578717 creator A5027030035 @default.
• W3216578717 creator A5033046567 @default.
• W3216578717 creator A5043782835 @default.
• W3216578717 creator A5055647062 @default.
• W3216578717 creator A5055696939 @default.
• W3216578717 creator A5057920490 @default.
• W3216578717 creator A5064591043 @default.
• W3216578717 creator A5069019085 @default.
• W3216578717 creator A5070926330 @default.
• W3216578717 creator A5082001097 @default.
• W3216578717 creator A5085711393 @default.
• W3216578717 creator A5088714594 @default.
• W3216578717 creator A5089707643 @default.
• W3216578717 date "2022-01-14" @default.
• W3216578717 modified "2023-10-16" @default.
• W3216578717 title "Wafer-level hermetically sealed silicon photonic MEMS" @default.
• W3216578717 cites W1995780562 @default.
• W3216578717 cites W1999705713 @default.
• W3216578717 cites W2003811155 @default.
• W3216578717 cites W2026341891 @default.
• W3216578717 cites W2034516644 @default.
• W3216578717 cites W2035306395 @default.
• W3216578717 cites W2073701851 @default.
• W3216578717 cites W2082350957 @default.
• W3216578717 cites W2099610951 @default.
• W3216578717 cites W2108974953 @default.
• W3216578717 cites W2138856326 @default.
• W3216578717 cites W2143308799 @default.
• W3216578717 cites W2156155548 @default.
• W3216578717 cites W2317181897 @default.
• W3216578717 cites W2515260639 @default.
• W3216578717 cites W2545782688 @default.
• W3216578717 cites W2810705618 @default.
• W3216578717 cites W2900579067 @default.
• W3216578717 cites W2905356895 @default.
• W3216578717 cites W2929378582 @default.
• W3216578717 cites W2940673525 @default.
• W3216578717 cites W2958459715 @default.
• W3216578717 cites W2976859966 @default.
• W3216578717 cites W2979736496 @default.
• W3216578717 cites W3007506111 @default.
• W3216578717 cites W3014569567 @default.
• W3216578717 cites W3047774761 @default.
• W3216578717 cites W3088347353 @default.
• W3216578717 cites W3095328009 @default.
• W3216578717 cites W3134861821 @default.
• W3216578717 cites W3138799074 @default.
• W3216578717 cites W3190203257 @default.
• W3216578717 cites W3205615004 @default.
• W3216578717 doi "https://doi.org/10.1364/prj.441215" @default.
• W3216578717 hasPublicationYear "2022" @default.
• W3216578717 type Work @default.
• W3216578717 sameAs 3216578717 @default.
• W3216578717 citedByCount "13" @default.
• W3216578717 countsByYear W32165787172022 @default.
• W3216578717 countsByYear W32165787172023 @default.
• W3216578717 crossrefType "journal-article" @default.
• W3216578717 hasAuthorship W3216578717A5006681830 @default.
• W3216578717 hasAuthorship W3216578717A5008851251 @default.
• W3216578717 hasAuthorship W3216578717A5015197676 @default.
• W3216578717 hasAuthorship W3216578717A5027030035 @default.
• W3216578717 hasAuthorship W3216578717A5033046567 @default.
• W3216578717 hasAuthorship W3216578717A5043782835 @default.
• W3216578717 hasAuthorship W3216578717A5055647062 @default.
• W3216578717 hasAuthorship W3216578717A5055696939 @default.
• W3216578717 hasAuthorship W3216578717A5057920490 @default.
• W3216578717 hasAuthorship W3216578717A5064591043 @default.
• W3216578717 hasAuthorship W3216578717A5069019085 @default.
• W3216578717 hasAuthorship W3216578717A5070926330 @default.
• W3216578717 hasAuthorship W3216578717A5082001097 @default.
• W3216578717 hasAuthorship W3216578717A5085711393 @default.
• W3216578717 hasAuthorship W3216578717A5088714594 @default.
• W3216578717 hasAuthorship W3216578717A5089707643 @default.
• W3216578717 hasBestOaLocation W32165787172 @default.
• W3216578717 hasConcept C119423029 @default.
• W3216578717 hasConcept C160671074 @default.
• W3216578717 hasConcept C192562407 @default.
• W3216578717 hasConcept C20788544 @default.
• W3216578717 hasConcept C2778965693 @default.
• W3216578717 hasConcept C2779133538 @default.
• W3216578717 hasConcept C37977207 @default.
• W3216578717 hasConcept C49040817 @default.
• W3216578717 hasConcept C97126364 @default.
• W3216578717 hasConceptScore W3216578717C119423029 @default.
• W3216578717 hasConceptScore W3216578717C160671074 @default.
• W3216578717 hasConceptScore W3216578717C192562407 @default.
• W3216578717 hasConceptScore W3216578717C20788544 @default.
• W3216578717 hasConceptScore W3216578717C2778965693 @default.
• W3216578717 hasConceptScore W3216578717C2779133538 @default.
• W3216578717 hasConceptScore W3216578717C37977207 @default.
• W3216578717 hasConceptScore W3216578717C49040817 @default.
• W3216578717 hasConceptScore W3216578717C97126364 @default.
• W3216578717 hasFunder F4320337663 @default.

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