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- W3217007046 abstract "in this study, we evaluated the effect of resist protection oxide (RPO) and contact etch stop layer (CESL) on the retention characteristics of non-volatile memory (NVM). Based on this comprehensive study, though thicker RPO thickness and NH3-based silicon nitride (SiN) CESL can improve data retention, few samples suffer unexpected large variation issues. These retention behaviors result in unstable data storage performance and potentially lead to product failures and production yield loss. An alternative solution has been explored to improve the data retention characteristic by replacing the NH3-based CESL with N2-based mixing NH3 gas flow. This method successfully demonstrates excellent data retention capability in the actual memory samples." @default.
- W3217007046 created "2021-12-06" @default.
- W3217007046 creator A5007229959 @default.
- W3217007046 creator A5066943248 @default.
- W3217007046 date "2021-09-15" @default.
- W3217007046 modified "2023-09-23" @default.
- W3217007046 title "Influence of RPO Film and CESL Material on Data Retention in Non-Volatile Memory" @default.
- W3217007046 cites W1589686892 @default.
- W3217007046 cites W1724712438 @default.
- W3217007046 cites W1970647114 @default.
- W3217007046 cites W1998048820 @default.
- W3217007046 cites W2018685382 @default.
- W3217007046 cites W2108812743 @default.
- W3217007046 cites W2146354068 @default.
- W3217007046 cites W2491045190 @default.
- W3217007046 cites W2540449061 @default.
- W3217007046 cites W2892135433 @default.
- W3217007046 doi "https://doi.org/10.1109/ipfa53173.2021.9617377" @default.
- W3217007046 hasPublicationYear "2021" @default.
- W3217007046 type Work @default.
- W3217007046 sameAs 3217007046 @default.
- W3217007046 citedByCount "1" @default.
- W3217007046 countsByYear W32170070462023 @default.
- W3217007046 crossrefType "proceedings-article" @default.
- W3217007046 hasAuthorship W3217007046A5007229959 @default.
- W3217007046 hasAuthorship W3217007046A5066943248 @default.
- W3217007046 hasConcept C134121241 @default.
- W3217007046 hasConcept C159985019 @default.
- W3217007046 hasConcept C171250308 @default.
- W3217007046 hasConcept C177950962 @default.
- W3217007046 hasConcept C185592680 @default.
- W3217007046 hasConcept C192562407 @default.
- W3217007046 hasConcept C2777431650 @default.
- W3217007046 hasConcept C2779227376 @default.
- W3217007046 hasConcept C2780866740 @default.
- W3217007046 hasConcept C3020018676 @default.
- W3217007046 hasConcept C43617362 @default.
- W3217007046 hasConcept C49040817 @default.
- W3217007046 hasConceptScore W3217007046C134121241 @default.
- W3217007046 hasConceptScore W3217007046C159985019 @default.
- W3217007046 hasConceptScore W3217007046C171250308 @default.
- W3217007046 hasConceptScore W3217007046C177950962 @default.
- W3217007046 hasConceptScore W3217007046C185592680 @default.
- W3217007046 hasConceptScore W3217007046C192562407 @default.
- W3217007046 hasConceptScore W3217007046C2777431650 @default.
- W3217007046 hasConceptScore W3217007046C2779227376 @default.
- W3217007046 hasConceptScore W3217007046C2780866740 @default.
- W3217007046 hasConceptScore W3217007046C3020018676 @default.
- W3217007046 hasConceptScore W3217007046C43617362 @default.
- W3217007046 hasConceptScore W3217007046C49040817 @default.
- W3217007046 hasLocation W32170070461 @default.
- W3217007046 hasOpenAccess W3217007046 @default.
- W3217007046 hasPrimaryLocation W32170070461 @default.
- W3217007046 hasRelatedWork W2102924097 @default.
- W3217007046 hasRelatedWork W2104937488 @default.
- W3217007046 hasRelatedWork W2141821492 @default.
- W3217007046 hasRelatedWork W2141872534 @default.
- W3217007046 hasRelatedWork W2171862007 @default.
- W3217007046 hasRelatedWork W2471337599 @default.
- W3217007046 hasRelatedWork W2801267388 @default.
- W3217007046 hasRelatedWork W2892135433 @default.
- W3217007046 hasRelatedWork W2979481617 @default.
- W3217007046 hasRelatedWork W4293242622 @default.
- W3217007046 isParatext "false" @default.
- W3217007046 isRetracted "false" @default.
- W3217007046 magId "3217007046" @default.
- W3217007046 workType "article" @default.