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• W3217554410 abstract "A microwave plasma model of a chemical vapour deposition (CVD) reactor is presented for understanding spatial heteroepitaxial growth of polycrystalline diamond on Si. This work is based on the TM0(n>1)p reactor (Seki Diamond 6K style) whereby a simplified H2 plasma model is used to show the radial variation in growth rate over small samples with different sample holders. The model uses a combination of an electromagnetic (EM) eigenfrequency solution, a frequency-transient EM/plasma fluid solution and a transient heat transfer solution and has been demonstrated at both low and high microwave power density. Experimental growths provide model validation with characterisation using Raman spectroscopy and scanning electron microscopy. The model and experiment demonstrate that samples shallow holders result in non-uniform diamond films, with a radial variation akin to the electron density and temperature distribution at the wafer surface. For the same process conditions, greater homogeneity is observed for taller holders, however, if the height is too extreme, the diamond quality reduces. From a modelling perspective, EM solutions are limited but useful for examining electric field focusing at the sample edges, resulting in accelerated diamond growth. For greater representations, plasma fluid and heat transfer solutions are imperative for modelling spatial growth variation." @default.
• W3217554410 created "2021-12-06" @default.
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• W3217554410 date "2021-11-19" @default.
• W3217554410 modified "2023-09-23" @default.
• W3217554410 title "Modelling microwave plasmas in Seki 6K style chemical vapour deposition diamond reactors" @default.
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• W3217554410 hasPublicationYear "2021" @default.
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