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- W323616518 abstract "Abstract : Material, chemical, physical, metallurgical and electrical effects in large scale integreated circuits (LSI) and other semiconductor devices are surveyed. Material transport phenomena, thermochemical and electrochemical effects, properties of metallization systems for semiconductor devices and semiconductor surface effects as they affect device performance and reliability are discussed. Eighty-nine references are provided. (Author)" @default.
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- W323616518 date "1972-08-01" @default.
- W323616518 modified "2023-09-27" @default.
- W323616518 title "Materials and Interface Factors Limiting LSI (Large Scale Integrated Circuits) Performance and Reliability." @default.
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