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- W331116641 abstract "Hafnium oxynitride films have been deposited onto a silicon substrate by means of radio frequency (RF) reactive sputtering using a hafnium dioxide <TEX>$(HfO_2)$</TEX> target with a variety of nitrogen! argon <TEX>$(N_2/Ar)$</TEX> gas flow ratios. Auger electron spectroscopy (AES)results confirm that <TEX>$N_2$</TEX> was successfully incorporated into the HfON films. An increase in the <TEX>$N_2/Ar$</TEX> gas flow ratio resulted in metal oxynitride formation. The films prepared with a <TEX>$N_2/Ar$</TEX> flow ratio of 20/20 sccm show (222), (530), and (611) directions of <TEX>$HfO_2N_2$</TEX>, and the (-111), (311) directions of <TEX>$HfO_2$</TEX>. From X-ray reflectometry measurements, it can be concluded that with <TEX>$N_2$</TEX> incorporated into the HfON films, the film density increases. The density increases from 9.8 to <TEX>$10.1g/cm^3$</TEX>. XRR also reveals that the surface roughness is related to the <TEX>$N_2/Ar$</TEX> flow ratio." @default.
- W331116641 created "2016-06-24" @default.
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- W331116641 date "2008-02-29" @default.
- W331116641 modified "2023-10-18" @default.
- W331116641 title "Influence of Nitrogen/argon Flow Ratio on the Crystallization of Hafnium Oxynitride Films" @default.
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- W331116641 doi "https://doi.org/10.4313/teem.2008.9.1.012" @default.
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