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- W33134975 abstract "Ion beam techniques such as ion projection can be used to structure materials on micrometer and nanometer scales. It can complement current optical or e-beam lithography techniques for micro- or nanodevice fabrication. Besides ion beam lithography also direct ion beam structuring methods that do not rely on resist materials for the pattern transfer have been investigated. Local sputtering, magnetic nanopatterning and inducement of selective electroplating are examples for such resistless ion beam patterning techniques. A new type of instrument based on a parallel multibeam concept will allow combining high resolution with high throughput." @default.
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- W33134975 date "2006-01-01" @default.
- W33134975 modified "2023-10-16" @default.
- W33134975 title "Micro- and nano- structuring using ion beams" @default.
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- W33134975 doi "https://doi.org/10.1016/b978-008045263-0/50003-9" @default.
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