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- W331508701 abstract "Ferroelectric (LTO) thin films were prepared by the modified sol-gel process. Acetylacetone(AcAc) was used as chelating agent, and D.I. water and nitric acid were added to the stock solution to control the amount of hydrolysis and condensation reaction. The solution was spin coated onto Pt/Ti/SiO₂/Si(100) and Pt/ZrO₂/SiO₂/Si(100) substrates. After multiple coating followed by baking treatment, the casst films were heat-treated for decomposition of residual organics, densification and crystallization. The role of acetylacetone to stabilize Ti isopropoxide by partially substituting OP ligand with AcAc was confirmed by FT-NMR spectroscopy analysis. The formation of B site-rich impurity phase in heat-treated LTO thin films were attributable either to the intermediate formation or to the La loss which may occur as the result of possible reaction with substrate. Further study is needed to clarify this point. Dielectric and electrical properties were measured and the results were compared with those for MOD-derived (LTO) thin film study by our group." @default.
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- W331508701 date "1999-01-01" @default.
- W331508701 modified "2023-09-23" @default.
- W331508701 title "Crystallization and Ferroelectric Properties of $La_2Ti_2O_7$ Thin Films Prepared by the Sol-Gel Process" @default.
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