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- W332117573 abstract "Abstract : In the research, characterizations were performed of the Extreme Ultraviolet outpit of our laser produced plasma system in the 30-1200 A region and have used the system for preliminary studies in high resolution spectroscopy in the grazing incidence region and in soft x ray microlithography. Contents: Laser Produced Plasma Light Sources; XUV and soft x ray Radiation from Laser Produced Plasmas as Laboratory Spectroscopic Sources Laser Produced Plasma Light Sources for High Resolution XUV and VUV Spectroscopy; Soft x ray Lithography using Radiation From Laser Produced Plasmas; Laser Produced Plasma Light Sources for High Resolution XUV and VUV Spectroscopy; High Resolution Spectra of Laser Plasma Light Sources in the Grazing Incidence Region; and Photometric Investigation of a Laser Produced Plasma VUV Light Source." @default.
- W332117573 created "2016-06-24" @default.
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- W332117573 date "1985-07-31" @default.
- W332117573 modified "2023-09-26" @default.
- W332117573 title "Intense XUV (Extreme Ultraviolet) Radiation Sources." @default.
- W332117573 hasPublicationYear "1985" @default.
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