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- W33655241 abstract "We review recent ion channeling methods for the analysis of the strain in epitaxially grown structures known as strained-layer superlattices (SLSs). These strain measurements have primarily utilized inclined-direction axial dechanneling or angular scans. More recently, a new channeling phenomenon, which involves a resonance between the planar channeling trajectory wavelength and the superlattice period, has been discovered in superlattices. Resonant conditions leading to both catastrophic dechanneling and resonant channeling are demonstrated for inclined planar directions in SLSs. Catastrophic dechanneling is shown to be the most sensitive of the channeling techniques for strain analysis. Comparison with detailed theoretical calculations shows that a simple modified-harmonic model can be used to extract the strain with relatively good accuracy from angular measurements of the catastropic dechanneling." @default.
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- W33655241 date "1985-01-01" @default.
- W33655241 modified "2023-09-27" @default.
- W33655241 title "Channeling analysis of strain in superlattices. [Strained-layer superlattices]" @default.
- W33655241 hasPublicationYear "1985" @default.
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