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- W341064478 abstract "An investigation on short-wavelength ablation mechanism of poly(1,4-phenylene ether ether-sulfune) PPEESand poly (1-hexadecene-sulfone) PHDS (Figure 9-10) by EUV radiation is presented. The goal of this work is to evaluate the ablation behavior with respect to the influence of wavelength, fluence and quantum efficiency. Because there is no yet a general EUV ablation theory, data are analyzed in order to underline regularity of the process which can be used in future to detect the scaling laws of the process. The differences with longer wavelengths ablation and EUV one are pointed out and possible applications of EUV ablation are proposed." @default.
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- W341064478 date "2015-05-12" @default.
- W341064478 modified "2023-09-27" @default.
- W341064478 title "EUV ablation: a study of the process" @default.
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- W341064478 doi "https://doi.org/10.1117/12.2178868" @default.
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