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- W341280944 abstract "This chapter discusses development and application of a new type of enzyme sensor based on ionselective MOS-capacitance structures. A new type of biosensor was developed on basis of MOS (metal-oxide semiconductors) structures, sensitive for protons or fluoride ions. These structures were produced according to conventional semiconductor techniques. For pH-sensitive MOS devices Si/SiO 2 /Si3N 4 /Ta 2 O 5 layers were used, for pF-sensitive MOS devices Si/SiO 2 /Si 3 N 4 /LaF 3 layers. The capacitance of these extremely cheap MOS layers change in dependence on the concentration of protons or fluoride ions. By using a specially designed electronic equipment, these sensors (MOSCAPs) are used in a constant charge mode to obtain always the best working conditions. The sensitivity is comparable to conventional sensors. The MOSCAPs were integrated into FIA systems to allow a coupling to bioprocesses. Different biosensors based on these devices for the detection of penicillin, urea, H 2 O 2 and glucose were tested. The principles of this sensor type, its working behavior and the application of the various BioMOSCAPs are discussed." @default.
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- W341280944 date "1994-01-01" @default.
- W341280944 modified "2023-09-27" @default.
- W341280944 title "Development Application of a New Type of Enzyme Sensor Based on lonselective MOS-Capacitance Structures" @default.
- W341280944 doi "https://doi.org/10.1016/b978-1-85617-242-4.50189-0" @default.
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