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- W34133610 abstract "The measurement of surface structure is increasingly important for the characterisation of components such as optical elements, micro-fluidic devices and micro-electro-mechanical system products. Traditionally, surface characterisation has been carried out using stylus-based instrumentation. More recently, surface scanning profilometry, such as atomic force microscopy, scanning near field optical microscopy, scanning white light interferometry and confocal microscopy, have become increasingly popular. In this paper we report a series of comparisons on sinusoidal and square wave artefacts using vertical scanning white-light interferometry, confocal microscopy, atomic force microscopy and stylus-based instrumentation. The results show variation between instruments and highlight some of the limitations that could affect the traceability of results." @default.
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- W34133610 date "2007-07-17" @default.
- W34133610 modified "2023-09-27" @default.
- W34133610 title "Measurement of structured surfaces using stylus AFM and optical methods." @default.
- W34133610 hasPublicationYear "2007" @default.
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