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• W341342677 endingPage "698" @default.
• W341342677 startingPage "671" @default.
• W341342677 abstract "MEMS, short for microelectromechanical systems, is an enabling technology with the potential to impact nearly all fields of science and engineering. In a general sense, MEMS consists of an integrated set of microfabricated sensors, actuators and electronics designed to perceive and act on its local environment in order to achieve a desired function. To make such systems possible, materials or material systems that have favorable mechanical and electrical properties are required. When researchers discovered that Si had favorable mechanical properties and could be machined into micromechanical structures, the field advanced rapidly by leveraging the know-how, techniques and infrastructure of the silicon IC industry. Si pressure sensors were among the first devices in this new field. These devices consisted of micromachined Si membranes and doped Si piezoresistors fabricated using relatively simple and straightforward bulk micromachining processes. With significant advancements in polycrystalline silicon (polysilicon) deposition and etch technologies, more complex Si mechanical elements, such as tethered membranes, micromotors, laterally actuated resonators, hinged plates and the like could be fabricated from thin films using surface micromachining techniques. The heavy dependence on IC materials and processing techniques opened the possibility for integrating microelectronics with microsensors and microactuators, thus differentiating MEMS from discrete sensor technologies." @default.
• W341342677 created "2016-06-24" @default.
• W341342677 creator A5006579771 @default.
• W341342677 creator A5012499326 @default.
• W341342677 date "2004-01-01" @default.
• W341342677 modified "2023-10-14" @default.
• W341342677 title "Micromachining of SiC" @default.
• W341342677 cites W1964892105 @default.
• W341342677 cites W1969376163 @default.
• W341342677 cites W1972091828 @default.
• W341342677 cites W1973289141 @default.
• W341342677 cites W1980150022 @default.
• W341342677 cites W1986870818 @default.
• W341342677 cites W1988577949 @default.
• W341342677 cites W1994933392 @default.
• W341342677 cites W1995669849 @default.
• W341342677 cites W1999420672 @default.
• W341342677 cites W2003851062 @default.
• W341342677 cites W2008967554 @default.
• W341342677 cites W2009085362 @default.
• W341342677 cites W2013162358 @default.
• W341342677 cites W2013628591 @default.
• W341342677 cites W2018019678 @default.
• W341342677 cites W2020656812 @default.
• W341342677 cites W2022070413 @default.
• W341342677 cites W2029365288 @default.
• W341342677 cites W2036092357 @default.
• W341342677 cites W2042066289 @default.
• W341342677 cites W2042955593 @default.
• W341342677 cites W2044181082 @default.
• W341342677 cites W2047097341 @default.
• W341342677 cites W2048286838 @default.
• W341342677 cites W2055128875 @default.
• W341342677 cites W2057451432 @default.
• W341342677 cites W2058571883 @default.
• W341342677 cites W2064069117 @default.
• W341342677 cites W2064964787 @default.
• W341342677 cites W2065370366 @default.
• W341342677 cites W2068803282 @default.
• W341342677 cites W2069057670 @default.
• W341342677 cites W2069770947 @default.
• W341342677 cites W2070447845 @default.
• W341342677 cites W2075445943 @default.
• W341342677 cites W2077043449 @default.
• W341342677 cites W2080291132 @default.
• W341342677 cites W2084064945 @default.
• W341342677 cites W2084839438 @default.
• W341342677 cites W2085138854 @default.
• W341342677 cites W2090587147 @default.
• W341342677 cites W2091998393 @default.
• W341342677 cites W2107346319 @default.
• W341342677 cites W2113758669 @default.
• W341342677 cites W2125906494 @default.
• W341342677 cites W2126448875 @default.
• W341342677 cites W2130300793 @default.
• W341342677 cites W2136022508 @default.
• W341342677 cites W2137033619 @default.
• W341342677 cites W2145085543 @default.
• W341342677 cites W2158892060 @default.
• W341342677 cites W2160959123 @default.
• W341342677 cites W2168530189 @default.
• W341342677 cites W2170940427 @default.
• W341342677 cites W2324293231 @default.
• W341342677 doi "https://doi.org/10.1007/978-3-642-18870-1_28" @default.
• W341342677 hasPublicationYear "2004" @default.
• W341342677 type Work @default.
• W341342677 sameAs 341342677 @default.
• W341342677 citedByCount "3" @default.
• W341342677 countsByYear W3413426772014 @default.
• W341342677 countsByYear W3413426772016 @default.
• W341342677 crossrefType "book-chapter" @default.
• W341342677 hasAuthorship W341342677A5006579771 @default.
• W341342677 hasAuthorship W341342677A5012499326 @default.
• W341342677 hasConcept C119599485 @default.
• W341342677 hasConcept C127413603 @default.
• W341342677 hasConcept C136525101 @default.
• W341342677 hasConcept C138331895 @default.
• W341342677 hasConcept C142724271 @default.
• W341342677 hasConcept C145667562 @default.
• W341342677 hasConcept C151054161 @default.
• W341342677 hasConcept C171250308 @default.
• W341342677 hasConcept C172707124 @default.
• W341342677 hasConcept C187937830 @default.
• W341342677 hasConcept C192562407 @default.
• W341342677 hasConcept C204787440 @default.
• W341342677 hasConcept C2779227376 @default.
• W341342677 hasConcept C2780565262 @default.
• W341342677 hasConcept C37977207 @default.
• W341342677 hasConcept C41075158 @default.
• W341342677 hasConcept C49040817 @default.
• W341342677 hasConcept C544956773 @default.
• W341342677 hasConcept C71924100 @default.
• W341342677 hasConcept C78519656 @default.
• W341342677 hasConcept C87359718 @default.
• W341342677 hasConcept C97126364 @default.
• W341342677 hasConceptScore W341342677C119599485 @default.
• W341342677 hasConceptScore W341342677C127413603 @default.
• W341342677 hasConceptScore W341342677C136525101 @default.

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