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- W342363674 abstract "It is difficult to measure precisely physical quantities in micro domain since effect of plural quantities that are negligible in macro domain becomes large. This study proposes a multi-function sensor that consists of multiple micro-cantilevers, which utilize bimorph construction. A measurement principle for detection of the plural physical quantities was briefly explained and a design guide was shown for fabrication of the micro-cantilevers with different length. The experimental results show that temperature and flow velocity can be detected simultaneously and independently using present multi-function sensor.Key wordsMulti-Function sensorMicro-CantileverBimorph" @default.
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- W342363674 date "2005-12-22" @default.
- W342363674 modified "2023-09-26" @default.
- W342363674 title "Design and Development of Multi-function Sensor Using a Group of Micro Cantilevers" @default.
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- W342363674 doi "https://doi.org/10.1007/0-306-47000-4_120" @default.
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