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- W343085879 abstract "A prototype W/Si layered structure analyzer (LSA) with 2d-spacing optimized for detection of N K..cap alpha.. radiation is used to study nitrogen incorporation in a-Si:(H,N) films. The LSA is part of a scanning electron microscope based wavelength dispersive x-ray microanalyzer or electron probe microanalyzer (EPMA). Nitrogen is one of the most difficult elements to detect by EPMA. Even when present in substantial concentrations poor count rates and signal to noise ratios are encountered. Quantitative analyses of 0.14 wt.% to 3.38 wt.% nitrogen in a-Si:(H,N) films are performed with the LSA and compared to equivalent analyses using a typical Langmuir-Blodgett fatty acid pseudocrystal, lead myristate (MYR). Using the LSA, the nitrogen count rate is increased by a factor of three, peak-to-background ratio is maintained and minimum detectability of nitrogen is improved." @default.
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- W343085879 date "1984-01-01" @default.
- W343085879 modified "2023-09-26" @default.
- W343085879 title "Detection of nitrogen with a layered structure analyzer in a wavelength dispersive X-ray microanalyzer" @default.
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