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- W346556646 abstract "The basic processes involved in making an integrated circuit are the production of patterns by photolithography, the deposition of thin films of insulators and conductors, doping of semiconductors, and patterning of material by etching. Excimer lasers are being used to perform each of these operations in the laboratory and, in some cases, are being considered for use in a production environment. This paper will review the developments in each of these areas. Two conference proceedings contain a number of articles dealing with excimer laser processing [1,2]." @default.
- W346556646 created "2016-06-24" @default.
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- W346556646 date "1984-01-01" @default.
- W346556646 modified "2023-09-27" @default.
- W346556646 title "Applications of Excimer Lasers to Semiconductor Processing" @default.
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- W346556646 doi "https://doi.org/10.1007/978-3-642-82381-7_32" @default.
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