Matches in SemOpenAlex for { <https://semopenalex.org/work/W346873826> ?p ?o ?g. }
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- W346873826 endingPage "498" @default.
- W346873826 startingPage "493" @default.
- W346873826 abstract "This Paper describes the Raman scattering characteristics of polycrystalline (Poly) 3C-SiC thin films, in which they were deposited on AlN buffer layer by APCVD using hexamethyldisilane (MHDS) and carrier gases (Ar+). When the Raman spectra of SiC films deposited on the AlN layer of before and after annealing were worked according to growth temperature, D and G bands of graphite were measured. It can be explained that poly 3C-SiC films admixe with nanoparticle graphite and its C/Si rate is higher than () that of the conventional SiC, which has no D and G bands related to graphite. From the Raman shifts of 3C-SiC films deposited at on the AlN layer of after annealing, the biaxial stress of poly 3C-SiC films was obtained as 896 MPa." @default.
- W346873826 created "2016-06-24" @default.
- W346873826 creator A5028577029 @default.
- W346873826 creator A5065045539 @default.
- W346873826 date "2008-06-01" @default.
- W346873826 modified "2023-09-25" @default.
- W346873826 title "Raman Scattering Characteristics of Polycrystalline 3C-SiC Thin Films deposited on AlN Buffer Layer" @default.
- W346873826 cites W1969291696 @default.
- W346873826 cites W1983045312 @default.
- W346873826 cites W2008924171 @default.
- W346873826 cites W2014528318 @default.
- W346873826 cites W2036692125 @default.
- W346873826 cites W2043140437 @default.
- W346873826 cites W2052686640 @default.
- W346873826 cites W2057101210 @default.
- W346873826 cites W2058272047 @default.
- W346873826 cites W2061826414 @default.
- W346873826 cites W2080880883 @default.
- W346873826 cites W2083461565 @default.
- W346873826 cites W2083933559 @default.
- W346873826 cites W2092330189 @default.
- W346873826 cites W2165312760 @default.
- W346873826 cites W2235679284 @default.
- W346873826 doi "https://doi.org/10.4313/jkem.2008.21.6.493" @default.
- W346873826 hasPublicationYear "2008" @default.
- W346873826 type Work @default.
- W346873826 sameAs 346873826 @default.
- W346873826 citedByCount "0" @default.
- W346873826 crossrefType "journal-article" @default.
- W346873826 hasAuthorship W346873826A5028577029 @default.
- W346873826 hasAuthorship W346873826A5065045539 @default.
- W346873826 hasBestOaLocation W3468738261 @default.
- W346873826 hasConcept C120665830 @default.
- W346873826 hasConcept C121332964 @default.
- W346873826 hasConcept C137637335 @default.
- W346873826 hasConcept C145018004 @default.
- W346873826 hasConcept C159985019 @default.
- W346873826 hasConcept C169573571 @default.
- W346873826 hasConcept C171250308 @default.
- W346873826 hasConcept C19067145 @default.
- W346873826 hasConcept C191897082 @default.
- W346873826 hasConcept C192562407 @default.
- W346873826 hasConcept C2779227376 @default.
- W346873826 hasConcept C40003534 @default.
- W346873826 hasConcept C41008148 @default.
- W346873826 hasConcept C49040817 @default.
- W346873826 hasConcept C76155785 @default.
- W346873826 hasConceptScore W346873826C120665830 @default.
- W346873826 hasConceptScore W346873826C121332964 @default.
- W346873826 hasConceptScore W346873826C137637335 @default.
- W346873826 hasConceptScore W346873826C145018004 @default.
- W346873826 hasConceptScore W346873826C159985019 @default.
- W346873826 hasConceptScore W346873826C169573571 @default.
- W346873826 hasConceptScore W346873826C171250308 @default.
- W346873826 hasConceptScore W346873826C19067145 @default.
- W346873826 hasConceptScore W346873826C191897082 @default.
- W346873826 hasConceptScore W346873826C192562407 @default.
- W346873826 hasConceptScore W346873826C2779227376 @default.
- W346873826 hasConceptScore W346873826C40003534 @default.
- W346873826 hasConceptScore W346873826C41008148 @default.
- W346873826 hasConceptScore W346873826C49040817 @default.
- W346873826 hasConceptScore W346873826C76155785 @default.
- W346873826 hasIssue "6" @default.
- W346873826 hasLocation W3468738261 @default.
- W346873826 hasOpenAccess W346873826 @default.
- W346873826 hasPrimaryLocation W3468738261 @default.
- W346873826 hasRelatedWork W1624440812 @default.
- W346873826 hasRelatedWork W1966846703 @default.
- W346873826 hasRelatedWork W2001167147 @default.
- W346873826 hasRelatedWork W2054273181 @default.
- W346873826 hasRelatedWork W2065114744 @default.
- W346873826 hasRelatedWork W2077710694 @default.
- W346873826 hasRelatedWork W2567469548 @default.
- W346873826 hasRelatedWork W2743498831 @default.
- W346873826 hasRelatedWork W2799832849 @default.
- W346873826 hasRelatedWork W2183045744 @default.
- W346873826 hasVolume "21" @default.
- W346873826 isParatext "false" @default.
- W346873826 isRetracted "false" @default.
- W346873826 magId "346873826" @default.
- W346873826 workType "article" @default.