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- W348513436 abstract "The use of site-competition epitaxy, which is based on intentional variation of the Si/C ratio during epitaxy, has now been reproduced in numerous national and international laboratories. However, previous reports have only considered dopant incorporation control for epitaxy on the Si-face 6H-SiC(OOO1) substrates. Presented in this paper is the extension of this technique for control of phosphorous incorporation and also a comparison of controlled doping on C-face 6H-SiC(OOO1) versus Si-face 6H-SiC(OOO1) substrates for aluminum, boron, nitrogen, and phosphorous." @default.
- W348513436 created "2016-06-24" @default.
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- W348513436 date "1995-01-01" @default.
- W348513436 modified "2023-09-27" @default.
- W348513436 title "Site-Competition Epitaxy for N-Type and P-Type Dopant Control in CVD Sic Epilayers" @default.
- W348513436 hasPublicationYear "1995" @default.
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