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- W348537336 abstract "The etch rate of a solid-excitation-based photochemical etching process for semiconductor materials is determined by the balance between recombination of photogenerated carriers and carrier participation in the surface etching reaction. Ion-implantation-induced damage of the semiconductor can shift the balance between recombination and reaction, permitting selective etching of undamaged regions of a semiconductor surface relative to ion-implanted, damaged regions. Spatially selective photochemical dry etching of n-GaAs has been achieved by this approach. 10 refs." @default.
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- W348537336 date "1987-01-01" @default.
- W348537336 modified "2023-09-23" @default.
- W348537336 title "Selective laser-induced photochemical dry etching of semiconductors controlled by ion-bombardment-induced damage" @default.
- W348537336 hasPublicationYear "1987" @default.
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