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- W348756049 abstract "Spatial light modulators (SLMs) based on indivvidually addressable micro-mirrors do show an increased use in projection displays, DUV lithography and adaptive optics. Mirror planarity and deflectio ..." @default.
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- W348756049 date "2009-01-01" @default.
- W348756049 modified "2023-09-26" @default.
- W348756049 title "Fabrication of mono-crystalline Silicon Micro-mirror Arrays using adhesive Wafer Transfer Bonding" @default.
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