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- W362045910 abstract "This paper is a synopsis of the introductory lecture at the American Chemical Society Symposium on Industrial Applications of Surface Analysis. Following a review of the objectives of surface analysis, an outline is given of the design principles for measurements to achieve these objectives. Then common techniques for surface analysis are surveyed briefly. An example of the application of these techniques in microelectronics is indicated. The paper concludes with an assessment of the major advances in surface analysis during the past decade and an indication of the major current trends which could lead to comparable advances during the coming decade." @default.
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- W362045910 date "1982-09-22" @default.
- W362045910 modified "2023-10-10" @default.
- W362045910 title "Industrial Applications of Surface Analysis" @default.
- W362045910 doi "https://doi.org/10.1021/bk-1982-0199" @default.
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