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- W36701342 abstract "Publisher Summary This chapter describes optical measurement of micro-topography of ultraprecision manufactured surfaces. It is not just the production of ultraprecision manufactured workpieces by single-point diamond turning, but also the examination of the generated surfaces by means of a high-quality measuring techniques that makes great demands on the precision and productivity of the methods used. The noncontact scanning is yet another advantage of the optical measuring technique. As a result, the interference microscopy has been established as an unrenounceable method of determining micro-topography, especially in the field of the UP-technology. An interference microscope was constructed by means of a highly precise, computer-controlled piezo-translator for phase-shifting and a CCD-camera with an 8-bitgrey level detection at 512 by 512 pixels. The set-up based on the new optical arrangement is well-suited to meet the requirements of the UP-technology with a good adaptation to many problems." @default.
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- W36701342 date "1994-01-01" @default.
- W36701342 modified "2023-09-23" @default.
- W36701342 title "Optical Measurement of Micro-Topography of Ultra-Precision Manufactured Surfaces" @default.
- W36701342 doi "https://doi.org/10.1016/b978-0-444-81901-7.50120-1" @default.
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