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• W37835819 endingPage "1805" @default.
• W37835819 startingPage "1802" @default.
• W37835819 abstract "This paper presents a novel approach for the formation of separated doped areas, where the diffusion barrier isishape SolarResistTM is inkjet-printed prior to a plasma-enhanced chemical vapor deposition (PECVD) process of boronand phosphorus-doped silicate glasses (BSG, PSG). This allows for very accurate single-sided definition of doped patterns without the use of masking and etching of diffusion barriers, diffusion sources or diffused areas. The printed patterns themselves are characterized regarding their thickness. The areas with the printed diffusion barrier are characterized with respect to their sheet resistance Rsh and their doping profile. The barrier effect was demonstrated for diffusion plateau times up to 30 min at 1050°C against diffusion from BSG-layers and for the same plateau time at 850°C against diffusion from PSG-layers." @default.
• W37835819 created "2016-06-24" @default.
• W37835819 creator A5010472131 @default.
• W37835819 creator A5013550182 @default.
• W37835819 creator A5020008560 @default.
• W37835819 creator A5024626412 @default.
• W37835819 creator A5027489865 @default.
• W37835819 creator A5049193761 @default.
• W37835819 creator A5064608814 @default.
• W37835819 creator A5066685554 @default.
• W37835819 creator A5067475862 @default.
• W37835819 creator A5076947455 @default.
• W37835819 creator A5077896584 @default.
• W37835819 creator A5085927330 @default.
• W37835819 creator A5090527992 @default.
• W37835819 date "2012-10-26" @default.
• W37835819 modified "2023-09-25" @default.
• W37835819 title "Inkjet-Printed Diffusion Barrier for Structured Doping Areas from Doped PECVD Silicate Glasses" @default.
• W37835819 cites W2021422629 @default.
• W37835819 cites W2030138928 @default.
• W37835819 cites W2038838017 @default.
• W37835819 cites W2128584894 @default.
• W37835819 cites W2170793762 @default.
• W37835819 cites W2527306283 @default.
• W37835819 cites W433396277 @default.
• W37835819 cites W67121823 @default.
• W37835819 doi "https://doi.org/10.4229/27theupvsec2012-2cv.6.1" @default.
• W37835819 hasPublicationYear "2012" @default.
• W37835819 type Work @default.
• W37835819 sameAs 37835819 @default.
• W37835819 citedByCount "0" @default.
• W37835819 crossrefType "proceedings-article" @default.
• W37835819 hasAuthorship W37835819A5010472131 @default.
• W37835819 hasAuthorship W37835819A5013550182 @default.
• W37835819 hasAuthorship W37835819A5020008560 @default.
• W37835819 hasAuthorship W37835819A5024626412 @default.
• W37835819 hasAuthorship W37835819A5027489865 @default.
• W37835819 hasAuthorship W37835819A5049193761 @default.
• W37835819 hasAuthorship W37835819A5064608814 @default.
• W37835819 hasAuthorship W37835819A5066685554 @default.
• W37835819 hasAuthorship W37835819A5067475862 @default.
• W37835819 hasAuthorship W37835819A5076947455 @default.
• W37835819 hasAuthorship W37835819A5077896584 @default.
• W37835819 hasAuthorship W37835819A5085927330 @default.
• W37835819 hasAuthorship W37835819A5090527992 @default.
• W37835819 hasConcept C100460472 @default.
• W37835819 hasConcept C113196181 @default.
• W37835819 hasConcept C121332964 @default.
• W37835819 hasConcept C127413603 @default.
• W37835819 hasConcept C142362112 @default.
• W37835819 hasConcept C153349607 @default.
• W37835819 hasConcept C159985019 @default.
• W37835819 hasConcept C171250308 @default.
• W37835819 hasConcept C185592680 @default.
• W37835819 hasConcept C192562407 @default.
• W37835819 hasConcept C2777335606 @default.
• W37835819 hasConcept C2777402240 @default.
• W37835819 hasConcept C2778836790 @default.
• W37835819 hasConcept C2779227376 @default.
• W37835819 hasConcept C2993621735 @default.
• W37835819 hasConcept C38347018 @default.
• W37835819 hasConcept C42360764 @default.
• W37835819 hasConcept C43617362 @default.
• W37835819 hasConcept C49040817 @default.
• W37835819 hasConcept C57410435 @default.
• W37835819 hasConcept C57863236 @default.
• W37835819 hasConcept C66825105 @default.
• W37835819 hasConcept C69357855 @default.
• W37835819 hasConcept C97355855 @default.
• W37835819 hasConceptScore W37835819C100460472 @default.
• W37835819 hasConceptScore W37835819C113196181 @default.
• W37835819 hasConceptScore W37835819C121332964 @default.
• W37835819 hasConceptScore W37835819C127413603 @default.
• W37835819 hasConceptScore W37835819C142362112 @default.
• W37835819 hasConceptScore W37835819C153349607 @default.
• W37835819 hasConceptScore W37835819C159985019 @default.
• W37835819 hasConceptScore W37835819C171250308 @default.
• W37835819 hasConceptScore W37835819C185592680 @default.
• W37835819 hasConceptScore W37835819C192562407 @default.
• W37835819 hasConceptScore W37835819C2777335606 @default.
• W37835819 hasConceptScore W37835819C2777402240 @default.
• W37835819 hasConceptScore W37835819C2778836790 @default.
• W37835819 hasConceptScore W37835819C2779227376 @default.
• W37835819 hasConceptScore W37835819C2993621735 @default.
• W37835819 hasConceptScore W37835819C38347018 @default.
• W37835819 hasConceptScore W37835819C42360764 @default.
• W37835819 hasConceptScore W37835819C43617362 @default.
• W37835819 hasConceptScore W37835819C49040817 @default.
• W37835819 hasConceptScore W37835819C57410435 @default.
• W37835819 hasConceptScore W37835819C57863236 @default.
• W37835819 hasConceptScore W37835819C66825105 @default.
• W37835819 hasConceptScore W37835819C69357855 @default.
• W37835819 hasConceptScore W37835819C97355855 @default.
• W37835819 hasLocation W378358191 @default.
• W37835819 hasOpenAccess W37835819 @default.
• W37835819 hasPrimaryLocation W378358191 @default.
• W37835819 hasRelatedWork W154184117 @default.
• W37835819 hasRelatedWork W1597467680 @default.

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