Matches in SemOpenAlex for { <https://semopenalex.org/work/W385377130> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W385377130 endingPage "390" @default.
- W385377130 startingPage "387" @default.
- W385377130 abstract "Silicon surface passivation is studied using Al2O3 thin film deposited by thermal process using atomic layer deposition (ALD) method. Minority carrier lifetime measurements showed that the film passivate the silicon surface effectively. Capacitance–voltage measurement confirms the activation of negative fixed charges after sintering at 400 °C." @default.
- W385377130 created "2016-06-24" @default.
- W385377130 creator A5000585328 @default.
- W385377130 creator A5011220601 @default.
- W385377130 creator A5017947174 @default.
- W385377130 creator A5057602050 @default.
- W385377130 creator A5059533616 @default.
- W385377130 creator A5065730581 @default.
- W385377130 creator A5069615943 @default.
- W385377130 creator A5074644683 @default.
- W385377130 creator A5083202667 @default.
- W385377130 date "2014-01-01" @default.
- W385377130 modified "2023-10-16" @default.
- W385377130 title "Silicon Surface Passivation by Al2O3 film using Atomic Layer Deposition" @default.
- W385377130 cites W1494720521 @default.
- W385377130 cites W1966793403 @default.
- W385377130 cites W1970107408 @default.
- W385377130 cites W1988107228 @default.
- W385377130 cites W1991716690 @default.
- W385377130 cites W1995836054 @default.
- W385377130 cites W2070687134 @default.
- W385377130 cites W2076306638 @default.
- W385377130 cites W2154027555 @default.
- W385377130 cites W2171472771 @default.
- W385377130 cites W2499844158 @default.
- W385377130 doi "https://doi.org/10.1007/978-3-319-03002-9_97" @default.
- W385377130 hasPublicationYear "2014" @default.
- W385377130 type Work @default.
- W385377130 sameAs 385377130 @default.
- W385377130 citedByCount "0" @default.
- W385377130 crossrefType "book-chapter" @default.
- W385377130 hasAuthorship W385377130A5000585328 @default.
- W385377130 hasAuthorship W385377130A5011220601 @default.
- W385377130 hasAuthorship W385377130A5017947174 @default.
- W385377130 hasAuthorship W385377130A5057602050 @default.
- W385377130 hasAuthorship W385377130A5059533616 @default.
- W385377130 hasAuthorship W385377130A5065730581 @default.
- W385377130 hasAuthorship W385377130A5069615943 @default.
- W385377130 hasAuthorship W385377130A5074644683 @default.
- W385377130 hasAuthorship W385377130A5083202667 @default.
- W385377130 hasBestOaLocation W3853771302 @default.
- W385377130 hasConcept C113196181 @default.
- W385377130 hasConcept C147789679 @default.
- W385377130 hasConcept C151730666 @default.
- W385377130 hasConcept C171250308 @default.
- W385377130 hasConcept C17525397 @default.
- W385377130 hasConcept C185592680 @default.
- W385377130 hasConcept C192562407 @default.
- W385377130 hasConcept C2779227376 @default.
- W385377130 hasConcept C2816523 @default.
- W385377130 hasConcept C30066665 @default.
- W385377130 hasConcept C33574316 @default.
- W385377130 hasConcept C43617362 @default.
- W385377130 hasConcept C49040817 @default.
- W385377130 hasConcept C544956773 @default.
- W385377130 hasConcept C64297162 @default.
- W385377130 hasConcept C69544855 @default.
- W385377130 hasConcept C86803240 @default.
- W385377130 hasConceptScore W385377130C113196181 @default.
- W385377130 hasConceptScore W385377130C147789679 @default.
- W385377130 hasConceptScore W385377130C151730666 @default.
- W385377130 hasConceptScore W385377130C171250308 @default.
- W385377130 hasConceptScore W385377130C17525397 @default.
- W385377130 hasConceptScore W385377130C185592680 @default.
- W385377130 hasConceptScore W385377130C192562407 @default.
- W385377130 hasConceptScore W385377130C2779227376 @default.
- W385377130 hasConceptScore W385377130C2816523 @default.
- W385377130 hasConceptScore W385377130C30066665 @default.
- W385377130 hasConceptScore W385377130C33574316 @default.
- W385377130 hasConceptScore W385377130C43617362 @default.
- W385377130 hasConceptScore W385377130C49040817 @default.
- W385377130 hasConceptScore W385377130C544956773 @default.
- W385377130 hasConceptScore W385377130C64297162 @default.
- W385377130 hasConceptScore W385377130C69544855 @default.
- W385377130 hasConceptScore W385377130C86803240 @default.
- W385377130 hasLocation W3853771301 @default.
- W385377130 hasLocation W3853771302 @default.
- W385377130 hasOpenAccess W385377130 @default.
- W385377130 hasPrimaryLocation W3853771301 @default.
- W385377130 hasRelatedWork W1495898976 @default.
- W385377130 hasRelatedWork W2001792619 @default.
- W385377130 hasRelatedWork W2001986919 @default.
- W385377130 hasRelatedWork W2041369327 @default.
- W385377130 hasRelatedWork W2154322410 @default.
- W385377130 hasRelatedWork W2174963655 @default.
- W385377130 hasRelatedWork W2216664967 @default.
- W385377130 hasRelatedWork W2405726436 @default.
- W385377130 hasRelatedWork W2973126787 @default.
- W385377130 hasRelatedWork W2977634868 @default.
- W385377130 isParatext "false" @default.
- W385377130 isRetracted "false" @default.
- W385377130 magId "385377130" @default.
- W385377130 workType "book-chapter" @default.