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- W39176970 abstract "The authors perform a comparative analysis of the use of Pearson-4 and double semi-Gaussian profiles for description of experimental data on ion doping of B, P, and As, in amorphous alpha- and polycrystalline poly-Si. The distribution moments obtained are compared with theoretical estimates which make it possible to accurately describe the profiles of boron (B/sup +/), phosphorus (P/sup +/), and Arsenic (As/sup +/), ion implantation in Si, if the Pearson-4 distribution is used for B and the double semi-Gaussian for P; for accurate description of As ion implantation profiles in Si, interpolation of the experimental moments must be used." @default.
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- W39176970 date "1986-03-01" @default.
- W39176970 modified "2023-09-23" @default.
- W39176970 title "Analysis of impurity profiles in ion-doped silicon" @default.
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