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- W400866608 abstract "The use of electrostatic transduction has enabled high-Q miniaturized mechanicalresonators made of non-piezoelectric material that vibrate at high and ultra highfrequencies. However, this transduction technique suffers from large values of motional resistance associated with the technique, limiting its use for interfacing tostandard 50 RF circuits. Piezoelectric transduction has advantages over the electrostatic method because of its comparable to 50 motional resistance. However,the technique requires use of thin film piezoelectric materials with the demonstratedQs that are much lower than their corresponding non-piezoelectric resonators. Thisresearch proposes use of electrodynamic transduction, reports analytic and experimental studies on electrodynamic transduction for RF application, highlights themethod’s advantages, and lists the contributions.The use of Lorentz-force transduction for RF micromechanical filters proposedin this work is pursued by experimentally evaluating the transduction techniqueimplemented for microfabricated designs. By fabricating single and coupled microresonators in a few different fabrication technologies, including CMOS35, theperformance of the Lorentz-force driven microresonators is studied. Using a laservibrometer, the actual performance, including the displacement and velocity of themoving points of the microstructures’ surfaces, are measured.The mode shapes and resonance specifications of the microstructures in air andvacuum derived by laser vibrometer provide data for characterizing the employedLorentz-force transduction technique. Furthermore, the results from the electricalmeasurements are compared to the micromechanical resonators’ frequency responseobtained from the mechanical measurements by laser vibrometer. The significantlylow values of motional resistance computed for the differently fabricated designsdemonstrate the advantage of Lorentz-force transduction for RF filter applications.Should a device similar in size be driven electrostatically, the motional resistancewould be multiple orders of magnitude higher.This research reports the experimental results obtained by examining a Lorentz-force transduction application for developing RF micromechanical filters. The results demonstrate the Lorentz-force transduction’s advantages over other transduction methods used for RF μ-mechanical filters. Compared to electrostatic transduction, the Lorentz-force method provides greater electromechanical coupling, multiple orders of magnitude lower motional resistance, the independence of the filtercenter frequency from the bias voltage, higher power handling, and no requirementfor bias lines, which decreases the work in microfabrication. Unlike piezoelectrictransduction, the electrodynamic technique requires no piezoelectric material. Useof non-piezoelectric materials provides more flexibility for resonator material inthe IC-compatible fabrications. Power handling in electrodynamic transductionhas fewer limitations than…" @default.
- W400866608 created "2016-06-24" @default.
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- W400866608 date "2012-02-27" @default.
- W400866608 modified "2023-09-23" @default.
- W400866608 title "Magnetic Transduction for RF Micromechanical Filters" @default.
- W400866608 hasPublicationYear "2012" @default.
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