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- W409609528 abstract "This paper studies the modifications induced in low-pressure radio-frequency capacitively coupled nitrogen plasmas, by the addition of a few amount of hydrogen (up to 5%). The plasmas are studied using both experiments (electrical and optical emission spectroscopy measurements) and simulations (using a fluid+kinetic code). Results reveal that the electron density increases with the amount of injected H2, at constant coupled power." @default.
- W409609528 created "2016-06-24" @default.
- W409609528 creator A5006699978 @default.
- W409609528 creator A5013860109 @default.
- W409609528 creator A5030645229 @default.
- W409609528 creator A5039102650 @default.
- W409609528 creator A5047112141 @default.
- W409609528 creator A5059826698 @default.
- W409609528 creator A5069520421 @default.
- W409609528 creator A5087122847 @default.
- W409609528 date "2012-07-10" @default.
- W409609528 modified "2023-10-14" @default.
- W409609528 title "RF Capacitively coupled plasmas in N2-H2 mixtures" @default.
- W409609528 hasPublicationYear "2012" @default.
- W409609528 type Work @default.
- W409609528 sameAs 409609528 @default.
- W409609528 citedByCount "0" @default.
- W409609528 crossrefType "proceedings-article" @default.
- W409609528 hasAuthorship W409609528A5006699978 @default.
- W409609528 hasAuthorship W409609528A5013860109 @default.
- W409609528 hasAuthorship W409609528A5030645229 @default.
- W409609528 hasAuthorship W409609528A5039102650 @default.
- W409609528 hasAuthorship W409609528A5047112141 @default.
- W409609528 hasAuthorship W409609528A5059826698 @default.
- W409609528 hasAuthorship W409609528A5069520421 @default.
- W409609528 hasAuthorship W409609528A5087122847 @default.
- W409609528 hasBestOaLocation W4096095281 @default.
- W409609528 hasConcept C121332964 @default.
- W409609528 hasConcept C184779094 @default.
- W409609528 hasConcept C185544564 @default.
- W409609528 hasConcept C192562407 @default.
- W409609528 hasConcept C49040817 @default.
- W409609528 hasConcept C68687820 @default.
- W409609528 hasConcept C82706917 @default.
- W409609528 hasConcept C95974651 @default.
- W409609528 hasConceptScore W409609528C121332964 @default.
- W409609528 hasConceptScore W409609528C184779094 @default.
- W409609528 hasConceptScore W409609528C185544564 @default.
- W409609528 hasConceptScore W409609528C192562407 @default.
- W409609528 hasConceptScore W409609528C49040817 @default.
- W409609528 hasConceptScore W409609528C68687820 @default.
- W409609528 hasConceptScore W409609528C82706917 @default.
- W409609528 hasConceptScore W409609528C95974651 @default.
- W409609528 hasLocation W4096095281 @default.
- W409609528 hasLocation W4096095282 @default.
- W409609528 hasLocation W4096095283 @default.
- W409609528 hasOpenAccess W409609528 @default.
- W409609528 hasPrimaryLocation W4096095281 @default.
- W409609528 hasRelatedWork W1998010466 @default.
- W409609528 hasRelatedWork W2001626320 @default.
- W409609528 hasRelatedWork W2081416520 @default.
- W409609528 hasRelatedWork W2095340684 @default.
- W409609528 hasRelatedWork W2133412959 @default.
- W409609528 hasRelatedWork W2745146410 @default.
- W409609528 hasRelatedWork W2790125938 @default.
- W409609528 hasRelatedWork W3185692063 @default.
- W409609528 hasRelatedWork W4239274462 @default.
- W409609528 hasRelatedWork W4256274706 @default.
- W409609528 isParatext "false" @default.
- W409609528 isRetracted "false" @default.
- W409609528 magId "409609528" @default.
- W409609528 workType "article" @default.