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- W412825274 abstract "Soft x-ray mirrors have been used as focussing elements in x-ray microscopes and other x-ray optics. Mirror surfaces must be figured very accurately and must be as smooth as possible to suppress unwanted x-ray scattering by surface irregularities. Since the production of supersmooth films for the soft x-ray multilayer mirror is our main concern, the most straight forward way to examine this quality is to measure the x-ray scattering in the same wavelength band which the mirror has been designed for." @default.
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- W412825274 date "1988-01-01" @default.
- W412825274 modified "2023-09-24" @default.
- W412825274 title "Scattering Measurements of Soft X-Ray Mirrors" @default.
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- W412825274 doi "https://doi.org/10.1007/978-3-540-39246-0_30" @default.
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