Matches in SemOpenAlex for { <https://semopenalex.org/work/W4200190668> ?p ?o ?g. }
- W4200190668 endingPage "108770" @default.
- W4200190668 startingPage "108770" @default.
- W4200190668 abstract "We report the comparative study on the growth and characterization of heteroepitaxial (001) and (111) diamond on Ir/(112¯0) and (0001) sapphire using direct current plasma chemical vapor deposition, in order to understand differences in heteroepitaxial behavior in both crystal directions as a preliminary step for large-sized high quality heteroepitaxial (111) diamond growth. An Ir deposition and bias-enhanced nucleation treatment were followed by 60, 190, and 1500 s diamond growth, under the same process conditions. The growth behaviors, morphological, and structural properties of the two crystal directions were greatly different. The growth rates of (001) and (111) diamond were 500 and 60 nm/min, respectively. The epitaxial relationships of (001) and (111) diamond were confirmed to be (001) diamond//(001) Ir//(112¯0) sapphire and (111) diamond//(111) Ir//(0001) sapphire. Further, in-plane relationship of (001) diamond was [1¯10] diamond//[1¯10] Ir//[11¯00] sapphire. In the case of (111) diamond growth, 180°-rotated twins and penetration twins in diamond were observed. The atomic force microscopy and X-ray rocking curve measurements exhibited that the surface roughness and the crystalline quality of (111) diamond were inferior to those of (001) diamond. Consequently, the growth conditions of Ir and diamond in [111] direction need to be considerably modified for suppressing twins and surface roughening and obtaining a high growth rate and high crystalline quality." @default.
- W4200190668 created "2021-12-31" @default.
- W4200190668 creator A5007345151 @default.
- W4200190668 creator A5056835724 @default.
- W4200190668 creator A5059750308 @default.
- W4200190668 creator A5064381250 @default.
- W4200190668 creator A5074637715 @default.
- W4200190668 date "2022-01-01" @default.
- W4200190668 modified "2023-10-18" @default.
- W4200190668 title "Growth and characterization of heteroepitaxial (001) and (111) diamond on Ir/sapphire structures" @default.
- W4200190668 cites W1965557917 @default.
- W4200190668 cites W1971540314 @default.
- W4200190668 cites W1979017325 @default.
- W4200190668 cites W1985940502 @default.
- W4200190668 cites W1986363951 @default.
- W4200190668 cites W1989186757 @default.
- W4200190668 cites W1991316121 @default.
- W4200190668 cites W1993971582 @default.
- W4200190668 cites W1998238712 @default.
- W4200190668 cites W2019165812 @default.
- W4200190668 cites W2021279881 @default.
- W4200190668 cites W2028056984 @default.
- W4200190668 cites W2030733884 @default.
- W4200190668 cites W2049574951 @default.
- W4200190668 cites W2055412837 @default.
- W4200190668 cites W2062285608 @default.
- W4200190668 cites W2062823550 @default.
- W4200190668 cites W2069917669 @default.
- W4200190668 cites W2077763379 @default.
- W4200190668 cites W2077808962 @default.
- W4200190668 cites W2081974692 @default.
- W4200190668 cites W2086972433 @default.
- W4200190668 cites W2089037601 @default.
- W4200190668 cites W2090179994 @default.
- W4200190668 cites W2126830164 @default.
- W4200190668 cites W2160771394 @default.
- W4200190668 cites W2296093653 @default.
- W4200190668 cites W2473893763 @default.
- W4200190668 cites W2562566456 @default.
- W4200190668 cites W2586507225 @default.
- W4200190668 cites W2656774672 @default.
- W4200190668 cites W2808574939 @default.
- W4200190668 cites W3006791027 @default.
- W4200190668 cites W3087699973 @default.
- W4200190668 cites W3104063932 @default.
- W4200190668 cites W3104471359 @default.
- W4200190668 cites W3124655723 @default.
- W4200190668 cites W3159290860 @default.
- W4200190668 doi "https://doi.org/10.1016/j.diamond.2021.108770" @default.
- W4200190668 hasPublicationYear "2022" @default.
- W4200190668 type Work @default.
- W4200190668 citedByCount "2" @default.
- W4200190668 countsByYear W42001906682022 @default.
- W4200190668 countsByYear W42001906682023 @default.
- W4200190668 crossrefType "journal-article" @default.
- W4200190668 hasAuthorship W4200190668A5007345151 @default.
- W4200190668 hasAuthorship W4200190668A5056835724 @default.
- W4200190668 hasAuthorship W4200190668A5059750308 @default.
- W4200190668 hasAuthorship W4200190668A5064381250 @default.
- W4200190668 hasAuthorship W4200190668A5074637715 @default.
- W4200190668 hasConcept C107365816 @default.
- W4200190668 hasConcept C110738630 @default.
- W4200190668 hasConcept C120665830 @default.
- W4200190668 hasConcept C121332964 @default.
- W4200190668 hasConcept C159985019 @default.
- W4200190668 hasConcept C162882748 @default.
- W4200190668 hasConcept C171250308 @default.
- W4200190668 hasConcept C178790620 @default.
- W4200190668 hasConcept C185592680 @default.
- W4200190668 hasConcept C192562407 @default.
- W4200190668 hasConcept C199289684 @default.
- W4200190668 hasConcept C2776921476 @default.
- W4200190668 hasConcept C2779227376 @default.
- W4200190668 hasConcept C2780064504 @default.
- W4200190668 hasConcept C49040817 @default.
- W4200190668 hasConcept C520434653 @default.
- W4200190668 hasConcept C57410435 @default.
- W4200190668 hasConcept C61048295 @default.
- W4200190668 hasConcept C8010536 @default.
- W4200190668 hasConceptScore W4200190668C107365816 @default.
- W4200190668 hasConceptScore W4200190668C110738630 @default.
- W4200190668 hasConceptScore W4200190668C120665830 @default.
- W4200190668 hasConceptScore W4200190668C121332964 @default.
- W4200190668 hasConceptScore W4200190668C159985019 @default.
- W4200190668 hasConceptScore W4200190668C162882748 @default.
- W4200190668 hasConceptScore W4200190668C171250308 @default.
- W4200190668 hasConceptScore W4200190668C178790620 @default.
- W4200190668 hasConceptScore W4200190668C185592680 @default.
- W4200190668 hasConceptScore W4200190668C192562407 @default.
- W4200190668 hasConceptScore W4200190668C199289684 @default.
- W4200190668 hasConceptScore W4200190668C2776921476 @default.
- W4200190668 hasConceptScore W4200190668C2779227376 @default.
- W4200190668 hasConceptScore W4200190668C2780064504 @default.
- W4200190668 hasConceptScore W4200190668C49040817 @default.
- W4200190668 hasConceptScore W4200190668C520434653 @default.
- W4200190668 hasConceptScore W4200190668C57410435 @default.
- W4200190668 hasConceptScore W4200190668C61048295 @default.
- W4200190668 hasConceptScore W4200190668C8010536 @default.