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• W4200216962 endingPage "106402" @default.
• W4200216962 startingPage "106402" @default.
• W4200216962 abstract "For integrated circuits (IC), as the technology node goes down to 20-14 nm, cobalt (Co) replaces tantalum as a new barrier layer material. The polishing process of multilayer wiring copper (Cu) film polishing is also changing from rough polishing and fine polishing to one-step polishing, and high removal rate (RR) of Cu and close to zero RR of Co are required, which can ensure a high selectivity of Cu/Co RR and stop the Cu film polishing on the barrier layer of Co. For such a goal, the way of decreasing Co RR is key and the selection of eco-friendly inhibitor of Co is essential. In this paper, the surface corrosion inhibition effect of sarcosine on Co in alkaline slurry and the inhibition mechanism were systematically investigated. The results indicated that the removal of Co was inhibited under both static and dynamic conditions with the addition of appropriate amount of sarcosine, which was also verified by scanning electron microscopy (SEM) measurements of cross sections and planes, and the corrosion area was diminished to 11.6%. Through discussing the corrosion inhibition mechanism, it was found that there were two main inhibition ways. One was by performing electrochemical experiments, and it was found that sarcosine primarily inhibited the anodic and cathodic reactions on the Co surface by forming a protective film and preventing further oxidative corrosion of Co. The others were analyzed by UV–visible test and X-ray photoelectron spectroscopy (XPS) test. It was found that sarcosine reacted with Co2+ in the glycine-based solution to generate mixed complex products deduced by new peaks emerged in XPS spectrogram, and the total amount of oxides and complexes decreased. These results indicated that sarcosine reduced the soluble complexes by competing and weakening the complex reaction with glycine. Furthermore, the Raman test indicated that Co2+ and sarcosine reacted in a 1:4 ratio to form a weakly stability water-soluble complex. The present study establishes the corrosion inhibition mechanism model of sarcosine on Co, and it also provides a new green corrosion inhibitor for Co with promising practical application." @default.
• W4200216962 created "2021-12-31" @default.
• W4200216962 creator A5009682433 @default.
• W4200216962 creator A5013205340 @default.
• W4200216962 creator A5021114787 @default.
• W4200216962 creator A5024385341 @default.
• W4200216962 creator A5049959303 @default.
• W4200216962 creator A5067802965 @default.
• W4200216962 creator A5086607379 @default.
• W4200216962 creator A5090754654 @default.
• W4200216962 date "2022-03-01" @default.
• W4200216962 modified "2023-10-05" @default.
• W4200216962 title "Surface corrosion inhibition mechanism of sarcosine as a green novel inhibitor on a novel barrier layer material of cobalt in copper film CMP for GLSI" @default.
• W4200216962 cites W12004139 @default.
• W4200216962 cites W160562242 @default.
• W4200216962 cites W1834628041 @default.
• W4200216962 cites W1977596790 @default.
• W4200216962 cites W1979905210 @default.
• W4200216962 cites W1982937072 @default.
• W4200216962 cites W1990304133 @default.
• W4200216962 cites W1996006049 @default.
• W4200216962 cites W1999262206 @default.
• W4200216962 cites W2008872357 @default.
• W4200216962 cites W2012201395 @default.
• W4200216962 cites W2012431636 @default.
• W4200216962 cites W2020219601 @default.
• W4200216962 cites W2023743690 @default.
• W4200216962 cites W2029304723 @default.
• W4200216962 cites W2031301630 @default.
• W4200216962 cites W2054996255 @default.
• W4200216962 cites W2056455266 @default.
• W4200216962 cites W2071751671 @default.
• W4200216962 cites W2072192561 @default.
• W4200216962 cites W2073433607 @default.
• W4200216962 cites W2080846569 @default.
• W4200216962 cites W2083171597 @default.
• W4200216962 cites W2086983693 @default.
• W4200216962 cites W2095962657 @default.
• W4200216962 cites W2108759916 @default.
• W4200216962 cites W2154272700 @default.
• W4200216962 cites W2194681652 @default.
• W4200216962 cites W2702148489 @default.
• W4200216962 cites W2745312240 @default.
• W4200216962 cites W2748600433 @default.
• W4200216962 cites W2896063049 @default.
• W4200216962 cites W2943812172 @default.
• W4200216962 cites W2980953199 @default.
• W4200216962 cites W2982777706 @default.
• W4200216962 cites W2984832748 @default.
• W4200216962 cites W2990795274 @default.
• W4200216962 cites W2994817436 @default.
• W4200216962 cites W3014717024 @default.
• W4200216962 cites W3040052229 @default.
• W4200216962 cites W3047615414 @default.
• W4200216962 cites W3086529909 @default.
• W4200216962 cites W3125438311 @default.
• W4200216962 cites W3153519874 @default.
• W4200216962 cites W3173958865 @default.
• W4200216962 doi "https://doi.org/10.1016/j.mssp.2021.106402" @default.
• W4200216962 hasPublicationYear "2022" @default.
• W4200216962 type Work @default.
• W4200216962 citedByCount "19" @default.
• W4200216962 countsByYear W42002169622022 @default.
• W4200216962 countsByYear W42002169622023 @default.
• W4200216962 crossrefType "journal-article" @default.
• W4200216962 hasAuthorship W4200216962A5009682433 @default.
• W4200216962 hasAuthorship W4200216962A5013205340 @default.
• W4200216962 hasAuthorship W4200216962A5021114787 @default.
• W4200216962 hasAuthorship W4200216962A5024385341 @default.
• W4200216962 hasAuthorship W4200216962A5049959303 @default.
• W4200216962 hasAuthorship W4200216962A5067802965 @default.
• W4200216962 hasAuthorship W4200216962A5086607379 @default.
• W4200216962 hasAuthorship W4200216962A5090754654 @default.
• W4200216962 hasConcept C127413603 @default.
• W4200216962 hasConcept C138113353 @default.
• W4200216962 hasConcept C147789679 @default.
• W4200216962 hasConcept C159985019 @default.
• W4200216962 hasConcept C17525397 @default.
• W4200216962 hasConcept C175708663 @default.
• W4200216962 hasConcept C180088628 @default.
• W4200216962 hasConcept C185592680 @default.
• W4200216962 hasConcept C191897082 @default.
• W4200216962 hasConcept C192562407 @default.
• W4200216962 hasConcept C20625102 @default.
• W4200216962 hasConcept C26771246 @default.
• W4200216962 hasConcept C2777756961 @default.
• W4200216962 hasConcept C2779943223 @default.
• W4200216962 hasConcept C42360764 @default.
• W4200216962 hasConcept C515207424 @default.
• W4200216962 hasConcept C515602321 @default.
• W4200216962 hasConcept C52859227 @default.
• W4200216962 hasConcept C544778455 @default.
• W4200216962 hasConcept C55493867 @default.
• W4200216962 hasConcept C89395315 @default.
• W4200216962 hasConceptScore W4200216962C127413603 @default.
• W4200216962 hasConceptScore W4200216962C138113353 @default.
• W4200216962 hasConceptScore W4200216962C147789679 @default.
• W4200216962 hasConceptScore W4200216962C159985019 @default.

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