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- W4200227924 abstract "We propose an out-of-plane electrostatic MEMS actuator capable of sensing its displacement. A repulsive force electrostatic arm is designed to form an actuator that push a suspended plate away from the substrate. A single capacitance sensing electrode is located beneath the moveable plate to measure the actuator vertical displacement. We demonstrate that the actuator, which was fabricated using a standard surface micromachining process, can provide a vertical displacement of 1.8 µm when excited with a 50 V DC voltage. This movement results in a reduction of the sensing electrode capacitance. Hence, the displacement of the actuator can be monitored as a function of the change in capacitance at the sensing electrode. This self-sensing feature allows the actuator to be utilized in closed-loop control systems as well as self-aligned optical platforms." @default.
- W4200227924 created "2021-12-31" @default.
- W4200227924 creator A5016083141 @default.
- W4200227924 creator A5021350285 @default.
- W4200227924 creator A5058919102 @default.
- W4200227924 date "2021-10-31" @default.
- W4200227924 modified "2023-10-03" @default.
- W4200227924 title "Surface Micromachined Out-of-plane Electrostatic MEMS Actuator Integrated with Displacement Sensor" @default.
- W4200227924 cites W1971812257 @default.
- W4200227924 cites W1978201146 @default.
- W4200227924 cites W2037099281 @default.
- W4200227924 cites W2043787481 @default.
- W4200227924 cites W2061488146 @default.
- W4200227924 cites W2178375864 @default.
- W4200227924 cites W2268088919 @default.
- W4200227924 cites W2771358189 @default.
- W4200227924 cites W2779191761 @default.
- W4200227924 cites W2908168600 @default.
- W4200227924 cites W2956148226 @default.
- W4200227924 cites W2962904447 @default.
- W4200227924 doi "https://doi.org/10.1109/sensors47087.2021.9639643" @default.
- W4200227924 hasPublicationYear "2021" @default.
- W4200227924 type Work @default.
- W4200227924 citedByCount "2" @default.
- W4200227924 countsByYear W42002279242022 @default.
- W4200227924 crossrefType "proceedings-article" @default.
- W4200227924 hasAuthorship W4200227924A5016083141 @default.
- W4200227924 hasAuthorship W4200227924A5021350285 @default.
- W4200227924 hasAuthorship W4200227924A5058919102 @default.
- W4200227924 hasConcept C107551265 @default.
- W4200227924 hasConcept C119599485 @default.
- W4200227924 hasConcept C120665830 @default.
- W4200227924 hasConcept C121332964 @default.
- W4200227924 hasConcept C127413603 @default.
- W4200227924 hasConcept C136525101 @default.
- W4200227924 hasConcept C142724271 @default.
- W4200227924 hasConcept C145667562 @default.
- W4200227924 hasConcept C15744967 @default.
- W4200227924 hasConcept C165801399 @default.
- W4200227924 hasConcept C172707124 @default.
- W4200227924 hasConcept C17525397 @default.
- W4200227924 hasConcept C192562407 @default.
- W4200227924 hasConcept C203455917 @default.
- W4200227924 hasConcept C204787440 @default.
- W4200227924 hasConcept C24890656 @default.
- W4200227924 hasConcept C30066665 @default.
- W4200227924 hasConcept C37977207 @default.
- W4200227924 hasConcept C49040817 @default.
- W4200227924 hasConcept C542102704 @default.
- W4200227924 hasConcept C62520636 @default.
- W4200227924 hasConcept C71924100 @default.
- W4200227924 hasConceptScore W4200227924C107551265 @default.
- W4200227924 hasConceptScore W4200227924C119599485 @default.
- W4200227924 hasConceptScore W4200227924C120665830 @default.
- W4200227924 hasConceptScore W4200227924C121332964 @default.
- W4200227924 hasConceptScore W4200227924C127413603 @default.
- W4200227924 hasConceptScore W4200227924C136525101 @default.
- W4200227924 hasConceptScore W4200227924C142724271 @default.
- W4200227924 hasConceptScore W4200227924C145667562 @default.
- W4200227924 hasConceptScore W4200227924C15744967 @default.
- W4200227924 hasConceptScore W4200227924C165801399 @default.
- W4200227924 hasConceptScore W4200227924C172707124 @default.
- W4200227924 hasConceptScore W4200227924C17525397 @default.
- W4200227924 hasConceptScore W4200227924C192562407 @default.
- W4200227924 hasConceptScore W4200227924C203455917 @default.
- W4200227924 hasConceptScore W4200227924C204787440 @default.
- W4200227924 hasConceptScore W4200227924C24890656 @default.
- W4200227924 hasConceptScore W4200227924C30066665 @default.
- W4200227924 hasConceptScore W4200227924C37977207 @default.
- W4200227924 hasConceptScore W4200227924C49040817 @default.
- W4200227924 hasConceptScore W4200227924C542102704 @default.
- W4200227924 hasConceptScore W4200227924C62520636 @default.
- W4200227924 hasConceptScore W4200227924C71924100 @default.
- W4200227924 hasLocation W42002279241 @default.
- W4200227924 hasOpenAccess W4200227924 @default.
- W4200227924 hasPrimaryLocation W42002279241 @default.
- W4200227924 hasRelatedWork W1607366266 @default.
- W4200227924 hasRelatedWork W2032189030 @default.
- W4200227924 hasRelatedWork W2114605097 @default.
- W4200227924 hasRelatedWork W2243199902 @default.
- W4200227924 hasRelatedWork W2369658360 @default.
- W4200227924 hasRelatedWork W2443015857 @default.
- W4200227924 hasRelatedWork W2940998761 @default.
- W4200227924 hasRelatedWork W2982249431 @default.
- W4200227924 hasRelatedWork W4200227924 @default.
- W4200227924 hasRelatedWork W4200270760 @default.
- W4200227924 isParatext "false" @default.
- W4200227924 isRetracted "false" @default.
- W4200227924 workType "article" @default.