FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4200264927> ?p ?o ?g. }

• W4200264927 abstract "Metal-nitride layers were used as tungsten (W)-diffusion barriers for ultra-thin (&lt;5 nm) Hf0.5Zr0.5O2 (HZO)-based ferroelectric capacitors with W as the bottom electrode. The influence of various metal nitrides (e.g., TiN, HfN, and ZrN) on the leakage properties, ferroelectricity, and reliability of the HZO capacitors was systematically investigated to identify appropriate materials for use as diffusion barriers in TiN/HZO/W stack capacitors. All the metal-nitrides were observed to significantly suppress W diffusion, resulting in a reduced leakage current. A comparative study between diffusion barriers revealed that the TiN/HZO/W stack capacitor with a ZrN layer exhibited the largest remanent polarization (2Pr) of 23 μC/cm2, as well as the highest reliability. This was attributed to the ZrN forming a ZrO2 interfacial layer, which could contribute to polarization switching and improve reliability. We quantitatively calculated the interfacial capacitance by performing the pulse switching measurement. In addition, crystal structures and diffusion properties with various metal nitrides are evaluated by analyzing grazing-angle incidence x-ray diffraction and x-ray photoelectron spectroscopy. These results provide a guideline for the fabrication of ultrathin HZO-based capacitors with stable ferroelectricity, reduced leakage, and excellent reliability." @default.
• W4200264927 created "2021-12-31" @default.
• W4200264927 creator A5006226384 @default.
• W4200264927 creator A5007737502 @default.
• W4200264927 creator A5029046108 @default.
• W4200264927 creator A5032709583 @default.
• W4200264927 date "2021-12-27" @default.
• W4200264927 modified "2023-10-06" @default.
• W4200264927 title "Enabling large ferroelectricity and excellent reliability for ultra-thin hafnia-based ferroelectrics with a W bottom electrode by inserting a metal-nitride diffusion barrier" @default.
• W4200264927 cites W1636395677 @default.
• W4200264927 cites W2005135813 @default.
• W4200264927 cites W2006380934 @default.
• W4200264927 cites W2006513190 @default.
• W4200264927 cites W2007978852 @default.
• W4200264927 cites W2011965307 @default.
• W4200264927 cites W2030237677 @default.
• W4200264927 cites W2048040049 @default.
• W4200264927 cites W2065351191 @default.
• W4200264927 cites W2094325813 @default.
• W4200264927 cites W2129733471 @default.
• W4200264927 cites W2207415652 @default.
• W4200264927 cites W2227553095 @default.
• W4200264927 cites W2291334276 @default.
• W4200264927 cites W2432648029 @default.
• W4200264927 cites W2468929476 @default.
• W4200264927 cites W2613687343 @default.
• W4200264927 cites W2735519424 @default.
• W4200264927 cites W2772734258 @default.
• W4200264927 cites W2796353531 @default.
• W4200264927 cites W2797332958 @default.
• W4200264927 cites W2799655565 @default.
• W4200264927 cites W2804080646 @default.
• W4200264927 cites W2808007855 @default.
• W4200264927 cites W2889470051 @default.
• W4200264927 cites W2893814120 @default.
• W4200264927 cites W2896836048 @default.
• W4200264927 cites W2921585007 @default.
• W4200264927 cites W2963216263 @default.
• W4200264927 cites W2969346197 @default.
• W4200264927 cites W2997199911 @default.
• W4200264927 cites W3011747191 @default.
• W4200264927 cites W3013521000 @default.
• W4200264927 cites W3030986227 @default.
• W4200264927 cites W3035479317 @default.
• W4200264927 cites W3086052748 @default.
• W4200264927 cites W3090265739 @default.
• W4200264927 cites W3105213179 @default.
• W4200264927 cites W3106021626 @default.
• W4200264927 cites W3113361193 @default.
• W4200264927 cites W3122511478 @default.
• W4200264927 cites W3149260830 @default.
• W4200264927 cites W3187544555 @default.
• W4200264927 doi "https://doi.org/10.1063/5.0072692" @default.
• W4200264927 hasPublicationYear "2021" @default.
• W4200264927 type Work @default.
• W4200264927 citedByCount "4" @default.
• W4200264927 countsByYear W42002649272023 @default.
• W4200264927 crossrefType "journal-article" @default.
• W4200264927 hasAuthorship W4200264927A5006226384 @default.
• W4200264927 hasAuthorship W4200264927A5007737502 @default.
• W4200264927 hasAuthorship W4200264927A5029046108 @default.
• W4200264927 hasAuthorship W4200264927A5032709583 @default.
• W4200264927 hasConcept C113196181 @default.
• W4200264927 hasConcept C119599485 @default.
• W4200264927 hasConcept C121332964 @default.
• W4200264927 hasConcept C127413603 @default.
• W4200264927 hasConcept C133386390 @default.
• W4200264927 hasConcept C139719470 @default.
• W4200264927 hasConcept C147789679 @default.
• W4200264927 hasConcept C159985019 @default.
• W4200264927 hasConcept C162324750 @default.
• W4200264927 hasConcept C165801399 @default.
• W4200264927 hasConcept C17525397 @default.
• W4200264927 hasConcept C175708663 @default.
• W4200264927 hasConcept C185592680 @default.
• W4200264927 hasConcept C191897082 @default.
• W4200264927 hasConcept C192562407 @default.
• W4200264927 hasConcept C194760766 @default.
• W4200264927 hasConcept C205049153 @default.
• W4200264927 hasConcept C2777042071 @default.
• W4200264927 hasConcept C2778836790 @default.
• W4200264927 hasConcept C2779227376 @default.
• W4200264927 hasConcept C43617362 @default.
• W4200264927 hasConcept C46141821 @default.
• W4200264927 hasConcept C49040817 @default.
• W4200264927 hasConcept C52192207 @default.
• W4200264927 hasConcept C525849907 @default.
• W4200264927 hasConcept C79090758 @default.
• W4200264927 hasConceptScore W4200264927C113196181 @default.
• W4200264927 hasConceptScore W4200264927C119599485 @default.
• W4200264927 hasConceptScore W4200264927C121332964 @default.
• W4200264927 hasConceptScore W4200264927C127413603 @default.
• W4200264927 hasConceptScore W4200264927C133386390 @default.
• W4200264927 hasConceptScore W4200264927C139719470 @default.
• W4200264927 hasConceptScore W4200264927C147789679 @default.
• W4200264927 hasConceptScore W4200264927C159985019 @default.
• W4200264927 hasConceptScore W4200264927C162324750 @default.
• W4200264927 hasConceptScore W4200264927C165801399 @default.
• W4200264927 hasConceptScore W4200264927C17525397 @default.
• W4200264927 hasConceptScore W4200264927C175708663 @default.

• next